Wafer bonding alignment

ABSTRACT

Alignment of devices formed on substrates that are to be bonded may be achieved through the use of scribe lines between the devices, where the scribe lines progressively increase or decrease in size from a center to an edge of one or more of the substrates to compensate for differences in the thermal expansion rates of the substrates. The devices on the substrates are brought into alignment as the substrates are heated during a bonding operation due to the progressively increased or decreased sizes of the scribe lines. The scribe lines may be arranged in a single direction in a substrate to compensate for thermal expansion along a single axis of the substrate or may be arranged in a plurality of directions to compensate for actinomorphic thermal expansion.

BACKGROUND

Bonding in the semiconductor industry is a technique that may be used toform stacked semiconductor devices and three-dimensional integratedcircuits. Some examples of bonding include wafer to wafer bonding, dieto wafer bonding, and die to die bonding.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a diagram of an example environment in which systems and/ormethods described herein may be implemented.

FIGS. 2A-2C, 3-9, and 10A-10D are diagrams of example implementationsdescribed herein.

FIG. 11 is a diagram of example components of one or more devices ofFIG. 1.

FIGS. 12-14 are flowcharts of example processes relating to waferbonding alignment.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Some semiconductor bonding techniques include heating substrates (e.g.,semiconductor wafers) to an elevated temperature. Examples includefusion bonding, eutectic bonding, and hybrid bonding. Substrates mayexpand in size during a bonding procedure due to thermal expansion asthe substrates are heated as part of the bonding procedure. Somesubstrates may expand more than other substrates. If substrates havingdifferent expansion rates are bonded together, the differences in theexpansion rates may result in the devices and/or structures formedthereon to be misaligned. This may cause poor device connections betweenthe substrates, may result in reduced bonding strength between thesubstrates, may result in weakened structural integrity of the resultingthree-dimensional integrated circuits, may result in poor qualityelectrical connections, and/or may result in device failures.

Some implementations described herein provide techniques and apparatusesfor wafer bonding alignment. As described herein, bonding alignment ofdevices formed on substrates that are to be bonded may be achievedthrough the use of scribe lines between the devices, where the scribelines progressively increase or decrease in size from a center to anedge of one or more of the substrates to compensate for differences inthe thermal expansion rates of the substrates. The devices on thesubstrates are brought into alignment as the substrates are heatedduring a bonding operation due to the progressively increased ordecreased sizes of the scribe lines. The scribe lines may be arranged ina single direction in a substrate to compensate for thermal expansionalong a single axis of the substrate or may be arranged in a pluralityof directions to compensate for actinomorphic thermal expansion. In thisway, the techniques and apparatuses described herein may reduce devicepattern misalignment, may increase bonding strength between substratesthat are bonded, may increase the structural integrity and electricalconnections of the devices, and/or may reduce device failures of thesubstrates.

FIG. 1 is a diagram of an example environment 100 in which systemsand/or methods described herein may be implemented. As shown in FIG. 1,environment 100 may include a plurality of semiconductor processingtools 102-110 and a wafer/die transport tool 112. The plurality ofsemiconductor processing tools 102-110 may include a deposition tool102, an exposure tool 104, a developer tool 106, an etch tool 108, abonding tool 110, and/or another type of semiconductor processing tool.The tools included in example environment 100 may be included in asemiconductor clean room, a semiconductor foundry, a semiconductorprocessing and/or manufacturing facility, and/or in another type ofsemiconductor processing environment.

The deposition tool 102 is a semiconductor processing tool that includesa semiconductor processing chamber and one or more devices capable ofdepositing various types of materials onto a substrate. In someimplementations, the deposition tool 102 includes a spin coating toolthat is capable of depositing a photoresist layer on a substrate such asa wafer. In some implementations, the deposition tool 102 includes achemical vapor deposition (CVD) tool such as a plasma-enhanced CVD(PECVD) tool, a high-density plasma CVD (HDP-CVD) tool, asub-atmospheric CVD (SACVD) tool, an atomic layer deposition (ALD) tool,a plasma-enhanced atomic layer deposition (PEALD) tool, or another typeof CVD tool. In some implementations, the deposition tool 102 includes aphysical vapor deposition (PVD) tool, such as a sputtering tool oranother type of PVD tool. In some implementations, the exampleenvironment 100 includes a plurality of types of deposition tools 102.

The exposure tool 104 is a semiconductor processing tool that is capableof exposing a photoresist layer to a radiation source, such as anultraviolet light (UV) source (e.g., a deep UV light source, an extremeUV light (EUV) source, and/or another type of UV source), and/or anx-ray source, an electron beam (e-beam) source, among other examples.The exposure tool 104 may expose a photoresist layer to the radiationsource to transfer a pattern from a photomask to the photoresist layer.The pattern may include one or more semiconductor device layer patternsfor forming one or more semiconductor devices, may include a pattern forforming one or more structures of a semiconductor device, may include apattern for etching various portions of a semiconductor device, and/orthe like. In some implementations, the exposure tool 104 includes ascanner, a stepper, or a similar type of exposure tool.

The developer tool 106 is a semiconductor processing tool that iscapable of developing a photoresist layer that has been exposed to aradiation source to develop a pattern transferred to the photoresistlayer from the exposure tool 104. In some implementations, the developertool 106 develops a pattern by removing unexposed portions of aphotoresist layer. In some implementations, the developer tool 106develops a pattern by removing exposed portions of a photoresist layer.In some implementations, the developer tool 106 develops a pattern bydissolving exposed or unexposed portions of a photoresist layer throughthe use of a chemical developer.

The etch tool 108 is a semiconductor processing tool that is capable ofetching various types of materials of a substrate, wafer, orsemiconductor device. For example, the etch tool 108 may include a wetetch tool, a dry etch tool, and/or the like. In some implementations,the etch tool 108 includes a chamber that is filled with an etchant, andthe substrate is placed in the chamber for a particular time period toremove particular amounts of one or more portions of the substrate. Insome implementations, the etch tool 108 may etch one or more portions ofa the substrate using a plasma etch or a plasma-assisted etch, which mayinvolve using an ionized gas to isotopically or directionally etch theone or more portions.

The bonding tool 110 is a semiconductor processing tool that is capableof bonding two or more substrates (e.g., two or more semiconductorsubstrates, two or more semiconductor wafers, two or more semiconductordevices) together. For example, the bonding tool 110 may include aeutectic bonding tool that is capable of forming a eutectic bond betweentwo or more substrates together by heating the two or more substrates toform a eutectic system between the materials of the two or moresubstrates. As another example, the bonding tool 110 may include afusion bonding tool, which may form a direct bond between two or moresubstrates (e.g., without the use of additional intermediate layersbetween the two or more substrates) by pre-bonding the substrates (e.g.,at or near room temperature) and annealing the substrates to completethe direct bond. In some implementations, the bonding tool 110 bonds twoor more substrates using a combination of bonding techniques, which maybe referred to as hybrid bonding.

Wafer/die transport tool 112 includes a mobile robot, a robot arm, atram or rail car, an overhead hoist transport (OHT) system, an automatedmaterial handling system (AMHS), and/or another type of device that areused to transport wafers and/or dies between semiconductor processingtools 102-110 and/or to and from other locations such as a wafer rack, astorage room, and/or the like. In some implementations, wafer/dietransport tool 112 may be a programmed device to travel a particularpath and/or may operate semi-autonomously or autonomously.

The number and arrangement of devices shown in FIG. 1 are provided asone or more examples. In practice, there may be additional devices,fewer devices, different devices, or differently arranged devices thanthose shown in FIG. 1. Furthermore, two or more devices shown in FIG. 1may be implemented within a single device, or a single device shown inFIG. 1 may be implemented as multiple, distributed devices.Additionally, or alternatively, a set of devices (e.g., one or moredevices) of environment 100 may perform one or more functions describedas being performed by another set of devices of environment 100.

FIGS. 2A-2C are diagrams of an example implementation 200 describedherein. The example implementation 200 may include an example ofprogressively sized scribe lines that are included on a single substrateof two substrates that are to be bonded. Moreover, the progressivelysized scribe lines may be included in a single direction in thesubstrate to compensate for thermal expansion of the substrate in thesingle direction. In this way, the progressively sized scribe lines maybe used to achieve approximate alignment of semiconductor devices on thetwo substrates in the single direction.

FIG. 2A illustrates a top-down view (or plan view) of a substrate 210and a substrate 220 that are to be bonded. The substrate 210 and thesubstrate 220 may be bonded using one or more of the bonding techniquesdescribed herein, such as eutectic bonding, fusion (or direct) bonding,hybrid bonding, or another semiconductor substrate bonding technique.The substrate 210 and the substrate 220 may each include a semiconductorwafer, a semiconductor substrate, or another type of substrate in and/oron which semiconductor devices may be formed. The substrate 210 and thesubstrate 220 may each be formed of silicon (Si), a material includingsilicon, a III-V compound semiconductor material such as galliumarsenide (GaAs), a silicon on insulator (SOI), or another type ofsemiconductor material. The substrate 210 and the substrate 220 may eachbe approximately round and may each include a 200 millimeter wafer(e.g., a wafer that is approximately 200 millimeters in diameter), a 300millimeter wafer (e.g., a wafer that is approximately 300 millimeters indiameter), or another sized wafer.

As shown in FIG. 2A, the substrate 210 may include a plurality ofsemiconductor devices 212, and the substrate 220 may include a pluralityof semiconductor devices 222. The semiconductor devices 212 and 222 maybe formed by one or more semiconductor processing techniques describedherein. Respective pairs of the semiconductor devices 212 and 222 may beformed into three-dimensional semiconductor devices that includetransistors (e.g., planar transistors, fin field effect transistors(finFETs), gate all around (GAA) transistors), memory devices, microelectro-mechanical systems (MEMs), application specific integratedcircuits (ASICs), system on chips (SoCs), and/or other types ofsemiconductor devices by bonding the substrate 210 and the substrate220.

The semiconductor devices 212 may be arranged in a grid on the substrate210 such that a plurality of scribe lines 214 separate rows (or columns)of the semiconductor devices 212, and a plurality of scribe lines 216separate columns (or rows) of the semiconductor devices 212. The scribelines 214 may be formed in a first direction (e.g., along the x-axisshown in FIG. 2A) in the substrate 210, and the scribe lines 216 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 2A) in the substrate 210 such that the scribe lines214 and the scribe lines 216 intersect at various locations across thesubstrate 210. Similarly, the semiconductor devices 222 may be arrangedin a grid on the substrate 220 such that a plurality of scribe lines 224separate rows (or columns) of the semiconductor devices 222, and aplurality of scribe lines 226 separate columns (or rows) of thesemiconductor devices 222. The scribe lines 224 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 2A) in the substrate220, and the scribe lines 226 may be formed in a second (e.g.,perpendicular) direction (e.g., along the y-axis shown in FIG. 2A) inthe substrate 220 such that the scribe lines 224 and the scribe lines226 intersect at various locations across the substrate 220.

A scribe line may include a trench, recess, layer, and/or otherstructure that functions as a guide for cutting a substrate into aplurality of individual dies. For example, the scribe lines 214 in thesubstrate 210 and the scribe lines 224 in the substrate 220 may be usedas guides for cutting (or dicing) pairs of semiconductor devices 212 and222 into individual dies in a first direction (e.g., along the x-axisshown in FIG. 2A) of the substrate 210 and the substrate 220. As anotherexample, the scribe lines 216 in the substrate 210 and the scribe lines226 in the substrate 220 may be used as guides for cutting (or dicing)pairs of semiconductor devices 212 and 222 into individual dies in asecond direction (e.g., along the y-axis shown in FIG. 2A) of thesubstrate 210 and the substrate 220. Moreover, the scribe lines 214,216, 224, and 226 may provide buffer areas between the semiconductordevices 212 and 222 to accommodate the kerf (or blade width) of a diecutting device so that the die cutting device can cut the semiconductordevices 212 and 222 into individual dies without cutting into the areasof the semiconductor devices 212 and 222. The scribe lines 214, 216,224, and/or 226 may include other features, such as lithographyalignment marks, overlay marks, thickness measurement structures,electrical test points, and/or other features to assist in themanufacturing of the semiconductor devices 212 and 222.

The scribe lines 214, 216, 224, and/or 226 may be formed by varioussemiconductor fabrication processes. In some implementations, thedeposition tool 102 forms a photoresist layer on the substrate 210, theexposure tool 104 exposes the photoresist layer to a radiation source topattern the photoresist layer, the developer tool 106 develops andremoves portions of the photoresist layer to expose the pattern, and theetch tool 108 etches portions of substrate 210 to form openings orrecesses in the substrate 310. In some implementations, the depositiontool 102 deposits one or more layers in the openings or recesses usingvarious PVD techniques, CVD techniques and/or ALD techniques, such assputtering, PECVD, HDP-CVD, SACVD, and/or PEALD, among other examples.In some implementations, one or more layers formed in the scribe lines214, 216, 224, and/or 226 may be etched (e.g., using the etch tool 108)using techniques such as poly etching, metal etching, and/or anothertype of etching technique.

As further shown in FIG. 2A, each of the scribe lines 214, 216, 224, and226 may have a particular width along a short dimension of the scribelines 214, 216, 224, and 226. The scribe lines 214, 224, and 226 may allhave a similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 210 and/or the substrate 220 may increase in diameterduring a bonding operation due to thermal expansion of the substrate 210and/or the substrate 220. As an example, a substrate may expand byapproximately 10 microns to approximately 100 microns for a 200millimeter substrate. The expansion rate of a substrate may be based onvarious factors and/or attributes of the substrate, such as the size ofthe substrate, the material composition of the substrate, and/or thestructural composition of the substrate (e.g., more compressive stressfilms may induce lower expansion rates), among other examples.

The substrate 210 may be referred to as a low expansion wafer and thesubstrate 220 may be referred to as a high expansion wafer in that thesubstrate 220 may have an expansion rate that is greater relative to theexpansion rate of the substrate 210. Accordingly, the scribe lines 216may have widths that are greater relative to the width (w1) of thescribe lines 226 (and the scribe lines 214 and 224) to compensate forthe greater thermal expansion of the substrate 220 relative to thethermal expansion of the substrate 210. The increased widths of thescribe lines 216 relative to the scribe lines 226 may result in thesemiconductor devices 212 and the semiconductor devices 222 starting outas misaligned along the x-axis (e.g., in the first direction) in abonding operation to bond the substrate 210 with the substrate 220.However, as the substrate 210 and the substrate 220 are heated in thebonding operation (which causes the substrate 210 and the substrate 220to expand), the combination of the increased widths of the scribe lines216 and the greater expansion rate of the substrate 220 results in thesemiconductor devices 212 and the semiconductor devices 222 moving intoapproximate alignment along the x-axis.

To further promote alignment between the semiconductor devices 212 andthe semiconductor devices 222, the scribe lines 216 may progressivelyincrease in width from near a center of the substrate 210 toward theedge (or outer perimeter) of the substrate 210. The progressive increasein width may compensate for the increasing expansion rate from near acenter of the substrate 220 to an edge of the substrate 220, which mayresult in greater displacement of semiconductor devices 222 near theedge of the substrate 220 relative to semiconductor devices 222 near thecenter of the substrate 220 during bonding. Accordingly, the widths ofthe scribe lines 216 may increase toward the edge of the substrate 210such that the spacing between the semiconductor devices 212 increasestoward the edge of the substrate 210 to compensate for the greaterdisplacement of the semiconductor devices 222 near the edge of thesubstrate 220 during bonding. In this way, the substrate 210 may includea plurality of subsets of the scribe lines 216, where each subset has adifferent width relative to other subsets of the scribe lines 216.

As an example, the scribe lines 216 may include a first subset 216 a ofone or more scribe lines and a second subset 216 b of one or more scribelines. The first subset 216 a may be located closer to the center of thesubstrate 210 relative to the second subset 216 b. The width (w2) of thesecond subset 216 b of the scribe lines 216 may be greater relative tothe width (w3) of the first subset 216 a of the scribe lines 216. Insome implementations, the widths of the scribe lines 216 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 210 increasing toward the edge of thesubstrate 210. As an example, if the width (w1) of the scribe lines 214,224, and 226 are approximately 80 microns, the width (w3) of the firstsubset 216 a may be in a range of approximately 81 microns toapproximately 84 microns, the width (w2) of the second subset 216 b maybe in a range of approximately 82 microns to approximately 88 microns,and so on. In some implementations, the scribe lines 216 include agreater quantity of subsets of progressively increasing widths from nearthe center of the substrate 210 to near the edge of the substrate 210.

FIGS. 2B and 2C illustrate cross-sectional elevation views (along thex-axis of FIG. 2A) of a bonding operation to bond the substrate 210 andthe substrate 220. The bonding operation may be performed in connectionwith the bonding tool 110. As shown in FIG. 2B, the substrate 210 andthe substrate 220 may be arranged such that the semiconductor devices212 are facing the semiconductor devices 222. The substrate 210 and thesubstrate 220 may be pre-bonded by placing the semiconductor devices 212on and/or against the semiconductor devices 222 (or vice-versa). Asfurther shown in FIG. 2B, at least a subset of the semiconductor devices212 and at least a subset of the semiconductor devices 222 do not alignat the pre-bonding stage. This is due to the widths of the scribe lines216 (e.g., the subset 216 a and the subset 216 b) being greater relativeto the widths of the scribe lines 226. Moreover, the magnitude or amountof misalignment may increase from near the centers of the substrate 210and the substrate 220 to near the edges of the substrate 210 and thesubstrate 220 due to the progressively increasing widths of the subset216 a and the subset 216 b.

As shown in FIG. 2C, the semiconductor devices 212 and the semiconductordevices 222 may be approximately aligned after the bonding operation. Asexplained above, the different expansion rates of the substrate 210 andthe substrate 220 may result in a greater amount of lateral displacementof the semiconductor devices 222 (e.g., along the x-axis in FIG. 2A)relative to the semiconductor devices 212. The progressive increase inwidths of the scribe lines 216 (e.g., the subset 216 a and the subset216 b) may compensate for the greater amount of lateral displacement ofthe semiconductor devices 222 in that the lateral displacement of thesemiconductor devices 222 may bring the semiconductor devices 222 intoalignment with the semiconductor devices 212, as shown in FIG. 2C.

A semiconductor device 212 and a semiconductor device 222 may bedetermined to be approximately aligned after bonding based on alignmentin one or more directions and/or along one or more axes. For example,the alignment of a semiconductor device 212 and a semiconductor device222 may be analyzed for alignment along the x-axis (which may also bereferred to left/right alignment) and/or alignment along the y-axis(which may also be referred to as top/bottom alignment). In someimplementations, the x-axis is defined as a vector that extends from afirst edge of a substrate to a second edge of the substrate across thewidest point on the substrate starting from an alignment mark on thesubstrate such as a wafer notch. In some implementations, the y-axis isapproximately perpendicular to the x-axis and is defined as a vectorthat extends from a first edge of a substrate to a second edge of thesubstrate across the widest point on the substrate.

In some implementations, a device (e.g., the bonding tool 110, aprocessing device 1002 described in connection with FIGS. 10A-10D,and/or another device) generates alignment data and determines whether asemiconductor device 212 and a semiconductor device 222 areapproximately aligned based on the alignment data. Alignment data mayinclude misalignment indexes (e.g., for the x-axis and the y-axis) basedon overlay test patterns of the substrate 210 and the substrate 220. Thealignment index may represent a percentage of non-overlapping area ofthe semiconductor device 212 and the semiconductor device 222 (e.g., thesurface area of the semiconductor device 212 that does not overlap withthe surface area of the semiconductor device 222 or vice-versa) or aratio between the non-overlapping area and the total surface area of thesemiconductor device 212 and the semiconductor device 222.

In some implementations, the device may determine the semiconductordevice 212 and the semiconductor device 222 to be approximately alignedbased on the percentage of non-overlapping area of the semiconductordevice 212 and the semiconductor device 222 being equal to or less thanapproximately 0.005%. In some implementations, the device may determinethe semiconductor device 212 and the semiconductor device 222 to beapproximately aligned based on the percentage of non-overlapping area ofthe semiconductor device 212 and the semiconductor device 222 beingequal to or less than approximately 0.002%. The techniques describedherein may enable a reduction in misalignment between semiconductordevices that are bonded together by approximately 60% or greater.

As indicated above, FIGS. 2A-2C are provided as an example. Otherexamples may differ from what is described with regard to FIGS. 2A-2C.

FIG. 3 is a diagram of an example implementation 300 described herein.The example implementation 300 may be similar to the exampleimplementation 200 in that the example implementation 300 includesprogressively sized scribe lines on a single substrate of two substratesthat are to be bonded. In addition, the example implementation 300includes a plurality of sets of progressively sized scribe lines in aplurality of directions on a single substrate to compensate for thermalexpansion of the substrate in a plurality of directions. In this way,the plurality of sets of progressively sized scribe lines may be used tocompensate for actinomorphic thermal expansion to achieve approximatealignment of semiconductor devices on the two substrates in a pluralityof directions.

As shown in FIG. 3, the example implementation 300 may include asubstrate 310 and a substrate 320 that are to be bonded. The substrate310 and the substrate 320 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 310 may include a pluralityof semiconductor devices 312, and the substrate 320 may include aplurality of semiconductor devices 322. The semiconductor devices 312and 322 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 312 and322 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 310 and thesubstrate 320.

The semiconductor devices 312 may be arranged in a grid on the substrate310 such that a plurality of scribe lines 314 separate rows (or columns)of the semiconductor devices 312, and a plurality of scribe lines 316separate columns (or rows) of the semiconductor devices 312. The scribelines 314 may be formed in a first direction (e.g., along the x-axisshown in FIG. 3) in the substrate 310, and the scribe lines 316 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 3) in the substrate 310 such that the scribe lines314 and the scribe lines 316 intersect at various locations across thesubstrate 310. Similarly, the semiconductor devices 322 may be arrangedin a grid on the substrate 320 such that a plurality of scribe lines 324separate rows (or columns) of the semiconductor devices 322, and aplurality of scribe lines 326 separate columns (or rows) of thesemiconductor devices 322. The scribe lines 324 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 3) in the substrate 320,and the scribe lines 326 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 3) in the substrate 320such that the scribe lines 324 and the scribe lines 326 intersect atvarious locations across the substrate 320.

As further shown in FIG. 3, each of the scribe lines 314, 316, 324, and326 may have a particular width along a short dimension of the scribelines 314, 316, 324, and 326. The scribe lines 324 and 326 may both havea similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 310 and the substrate 320 may experience actinomorphicthermal expansion during a bonding operation due to thermal expansion ofthe substrate 310 and the substrate 320. As a result, the size of eachof the substrate 310 and the substrate 320 may increase in a radiallysymmetric manner such that the respective diameters of the substrate 310and the substrate 320 may increase along the x-axis and along the y-axisillustrated in FIG. 3. Moreover, the substrate 310 may be referred to asa low expansion wafer and the substrate 320 may be referred to as a highexpansion wafer in that the substrate 320 may have an expansion ratethat is greater relative to the expansion rate of the substrate 310. Tocompensate for the greater actinomorphic thermal expansion of thesubstrate 320, the scribe lines 314 and the scribe lines 316 may havewidths that are greater relative to the width (w1) of the scribe lines324 and 326.

The increased widths of the scribe lines 316 relative to the scribelines 326 may result in the semiconductor devices 312 and thesemiconductor devices 322 starting out as misaligned along the x-axis(e.g., in the first direction) in a bonding operation to bond thesubstrate 310 with the substrate 320. However, as the substrate 310 andthe substrate 320 are heated in the bonding operation (which causes thesubstrate 310 and the substrate 320 to expand), the combination of theincreased widths of the scribe lines 316 and the greater expansion rateof the substrate 320 results in the semiconductor devices 312 and thesemiconductor devices 322 moving into approximate alignment along thex-axis.

Similarly, the increased widths of the scribe lines 314 relative to thescribe lines 324 may result in the semiconductor devices 312 and thesemiconductor devices 322 starting out as misaligned along the y-axis(e.g., in the second direction) in a bonding operation to bond thesubstrate 310 with the substrate 320. However, as the substrate 310 andthe substrate 320 are heated in the bonding operation (which causes thesubstrate 310 and the substrate 320 to expand), the combination of theincreased widths of the scribe lines 314 and the greater expansion rateof the substrate 320 results in the semiconductor devices 312 and thesemiconductor devices 322 moving into approximate alignment along they-axis.

To further promote alignment between the semiconductor devices 312 andthe semiconductor devices 322 along the x-axis (e.g., in the firstdirection), the scribe lines 316 may progressively increase in widthfrom near a center of the substrate 310 toward the edge (or outerperimeter) of the substrate 310. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 320 to an edge of the substrate 320 along the x-axis (e.g., inthe first direction), which may result in greater displacement ofsemiconductor devices 322 near the edge of the substrate 320 relative tosemiconductor devices 322 near the center of the substrate 320 duringbonding. Accordingly, the widths of the scribe lines 316 may increasetoward the edge of the substrate 310 such that the spacing between thesemiconductor devices 312 increases toward the edge of the substrate 310to compensate for the greater displacement of the semiconductor devices322 near the edge of the substrate 320 during bonding. In this way,substrate 310 may include a plurality of subsets of the scribe lines316, where each subset has a different width relative to other subsetsof the scribe lines 316.

As an example, the scribe lines 316 may include a first subset 316 a ofone or more scribe lines and a second subset 316 b of one or more scribelines. The first subset 316 a may be located closer to the center of thesubstrate 310 relative to the second subset 316 b. The width (w2) of thesecond subset 316 b of the scribe lines 316 may be greater relative tothe width (w3) of the first subset 316 a of the scribe lines 316. Insome implementations, the widths of the scribe lines 316 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 310 and increasing toward the edge of thesubstrate 310. As an example, if the width (w1) of the scribe lines 324and 326 are approximately 60 microns, the width (w3) of the first subset316 a may be in a range of approximately 61 microns to approximately 64microns, the width (w2) of the second subset 316 b may be in a range ofapproximately 62 microns to approximately 68 microns, and so on. In someimplementations, the scribe lines 316 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 310 to near the edge of the substrate 310.

To further promote alignment between the semiconductor devices 312 andthe semiconductor devices 322 along the y-axis (e.g., in the seconddirection), the scribe lines 314 may progressively increase in widthfrom near a center of the substrate 310 toward the edge (or outerperimeter) of the substrate 310. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 320 to an edge of the substrate 320 along the y-axis (e.g., inthe second direction), which may result in greater displacement ofsemiconductor devices 322 near the edge of the substrate 320 relative tosemiconductor devices 322 near the center of the substrate 320 duringbonding. Accordingly, the widths of the scribe lines 314 may increasetoward the edge of the substrate 310 such that the spacing between thesemiconductor devices 312 increases toward the edge of the substrate 310to compensate for the greater displacement of the semiconductor devices322 near the edge of the substrate 320 during bonding. In this way, thesubstrate 310 may include a plurality of subsets of the scribe lines314, where each subset has a different width relative to other subsetsof the scribe lines 314.

As an example, the scribe lines 314 may include a first subset 314 a ofone or more scribe lines and a second subset 314 b of one or more scribelines. The first subset 314 a may be located closer to the center of thesubstrate 310 relative to the second subset 314 b. The width (w4) of thesecond subset 314 b of the scribe lines 314 may be greater relative tothe width (w5) of the first subset 314 a of the scribe lines 314. Insome implementations, the widths of the scribe lines 314 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting fromnear the center of the substrate 310 and increasing to near the edge ofthe substrate 310. As an example, if the width (w1) of the scribe lines324 and 326 are approximately 70 microns, the width (w5) of the firstsubset 314 a may be in a range of approximately 71 microns toapproximately 74 microns, the width (w4) of the second subset 314 b maybe in a range of approximately 72 microns to approximately 78 microns,and so on. In some implementations, the scribe lines 314 include agreater quantity of subsets of progressively increasing widths from nearthe center of the substrate 310 toward the edge of the substrate 310.

As indicated above, the scribe lines 314 and 316 may progressivelyincrease in width from near the center of the substrate 310 to near theedge of the substrate 310 to compensate for actinomorphic thermalexpansion of the substrate 320. Accordingly, the increases in the widthsof the scribe lines 314 and 316 may be approximately equal to compensatefor the radially symmetric thermal expansion of the substrate 320. Insome implementations, the increases in the widths of the scribe lines314 and 316 may be different to compensate for asymmetric thermalexpansion of the substrate 310, such as in cases where different typesof devices are formed along the x-axis and along the y-axis of thesubstrate 320 (which may result in asymmetric thermal expansion ratesalong the x-axis and the y-axis of the substrate 320).

As indicated above, FIG. 3 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 3.

FIG. 4 is a diagram of an example implementation 400 described herein.The example implementation 400 may include an example of progressivelysized scribe lines that are included on a single substrate of twosubstrates that are to be bonded. Moreover, the progressively sizedscribe lines may be included in a single direction in the substrate tocompensate for thermal expansion of the substrate in the singledirection. The example implementation 400 may be different from theexample implementation 200 in that progressively sized scribe linesdecrease in width from a center of a high expansion rate substrate thatis to be bonded with a low expansion rate substrate toward an edge ofthe high expansion rate substrate. In this way, the progressively sizedscribe lines of decreasing width facilitate alignment of semiconductordevices on substrates that are to be bonded together while the decreasedscribe line sizes may enable an increased semiconductor device densityon the substrates.

FIG. 4 illustrates a top-down view (or plan view) of a substrate 410 anda substrate 420 that are to be bonded. The substrate 410 and thesubstrate 420 may be bonded using one or more of the bonding techniquesdescribed herein, such as eutectic bonding, fusion (or direct) bonding,hybrid bonding, or another type of semiconductor substrate bondingtechnique. The substrate 410 and the substrate 420 may each include asemiconductor wafer, a semiconductor substrate, or another type ofsubstrate in and/or on which semiconductor devices may be formed.

As shown in FIG. 4, the substrate 410 may include a plurality ofsemiconductor devices 412, and the substrate 420 may include a pluralityof semiconductor devices 422. The semiconductor devices 412 may bearranged in a grid on the substrate 410 such that a plurality of scribelines 414 separate rows (or columns) of the semiconductor devices 412,and a plurality of scribe lines 416 separate columns (or rows) of thesemiconductor devices 412. The scribe lines 414 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 4) in the substrate 410,and the scribe lines 416 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 4) in the substrate 410such that the scribe lines 414 and the scribe lines 416 intersect atvarious locations across the substrate 410. Similarly, the semiconductordevices 422 may be arranged in a grid on the substrate 420 such that aplurality of scribe lines 424 separate rows (or columns) of thesemiconductor devices 422, and a plurality of scribe lines 426 separatecolumns (or rows) of the semiconductor devices 422. The scribe lines 424may be formed in a first direction (e.g., along the x-axis shown in FIG.4) in the substrate 420, and the scribe lines 426 may be formed in asecond (e.g., perpendicular) direction (e.g., along the y-axis shown inFIG. 4) in the substrate 420 such that the scribe lines 424 and thescribe lines 426 intersect at various locations across the substrate420.

As further shown in FIG. 4, each of the scribe lines 414, 416, 424, and426 may have a particular width along a short dimension of the scribelines 414, 416, 424, and 426. The scribe lines 414, 416, and 424 may allhave a similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 410 may be referred to as a low expansion wafer and thesubstrate 420 may be referred to as a high expansion wafer in that thesubstrate 420 may have an expansion rate that is greater relative to theexpansion rate of the substrate 410. Thus, the substrate 420 may expandin size (e.g., in diameter) a greater amount relative to the substrate410. In the example implementation 400, the scribe lines 426 may havewidths that are lesser relative to the width (w1) of the scribe lines414, 416, and 424 to compensate for the greater thermal expansion of thesubstrate 420 relative to the thermal expansion of the substrate 410.The decreased widths of the scribe lines 426 relative to the scribelines 416 may result in the semiconductor devices 412 and thesemiconductor devices 422 starting out as misaligned along the x-axis(e.g., in the first direction) in a bonding operation to bond thesubstrate 410 with the substrate 420. However, as the substrate 410 andthe substrate 420 are heated in the bonding operation (which causes thesubstrate 410 and the substrate 420 to expand), the combination of thereduced widths of the scribe lines 426 and the greater expansion rate ofthe substrate 420 results in the semiconductor devices 412 and thesemiconductor devices 422 moving into approximate alignment along thex-axis.

To further promote alignment between the semiconductor devices 412 andthe semiconductor devices 422, the scribe lines 426 may progressivelydecrease in width from near a center of the substrate 420 toward theedge (or outer perimeter) of the substrate 420. The progressive decreasein width may compensate for the increasing expansion rate from near acenter of the substrate 420 toward an edge of the substrate 420. Theincreasing expansion may result in greater displacement of semiconductordevices 422 near the edge of the substrate 420 relative to semiconductordevices 422 near the center of the substrate 420 during bonding.Accordingly, the widths of the scribe lines 426 may decrease toward theedge of the substrate 420 such that the spacing between thesemiconductor devices 422 decreases toward the edge of the substrate 420to compensate for the greater displacement of the semiconductor devices422 near the edge of the substrate 420 during bonding. In this way, thesubstrate 420 may include a plurality of subsets of the scribe lines426, where each subset has a different width relative to other subsetsof the scribe lines 426.

As an example, the scribe lines 426 may include a first subset 426 a ofone or more scribe lines and a second subset 426 b of one or more scribelines. The first subset 426 a may be located closer to the center of thesubstrate 420 relative to the second subset 426 b. The width (w2) of thesecond subset 426 b of the scribe lines 426 may be lesser relative tothe width (w3) of the first subset 426 a of the scribe lines 426. Insome implementations, the widths of the scribe lines 426 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 420 and decreasing toward the edge of thesubstrate 420. As an example, if the width (w1) of the scribe lines 414,416, and 424 are approximately 90 microns, the width (w3) of the firstsubset 426 a may be in a range of approximately 86 microns toapproximately 89 microns, the width (w2) of the second subset 426 b maybe in a range of approximately 82 microns to approximately 88 microns,and so on. In some implementations, the scribe lines 426 include agreater quantity of subsets of progressively decreasing widths from nearthe center of the substrate 420 to near the edge of the substrate 420.

As indicated above, FIG. 4 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 4.

FIG. 5 is a diagram of an example implementation 500 described herein.The example implementation 500 may be similar to the exampleimplementation 400 in that the example implementation 500 includesscribe lines of progressively decreasing widths on a single substrate oftwo substrates that are to be bonded. In addition, the exampleimplementation 500 includes a plurality of sets of scribe lines ofprogressively decreasing widths in a plurality of directions on a singlesubstrate to compensate for thermal expansion in a plurality ofdirections. In this way, the plurality of sets of scribe lines ofprogressively decreasing widths may be used to compensate foractinomorphic thermal expansion to achieve approximate alignment ofsemiconductor devices on the two substrates in a plurality ofdirections.

As shown in FIG. 5, the example implementation 500 may include asubstrate 510 and a substrate 520 that are to be bonded. The substrate510 and the substrate 520 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 510 may include a pluralityof semiconductor devices 512, and the substrate 520 may include aplurality of semiconductor devices 522. The semiconductor devices 512and 520 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 512 and522 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 510 and thesubstrate 520.

The semiconductor devices 512 may be arranged in a grid on the substrate510 such that a plurality of scribe lines 514 separate rows (or columns)of the semiconductor devices 512, and a plurality of scribe lines 516separate columns (or rows) of the semiconductor devices 512. The scribelines 514 may be formed in a first direction (e.g., along the x-axisshown in FIG. 5) in the substrate 510, and the scribe lines 516 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 5) in the substrate 510 such that the scribe lines514 and the scribe lines 516 intersect at various locations across thesubstrate 510. Similarly, the semiconductor devices 522 may be arrangedin a grid on the substrate 520 such that a plurality of scribe lines 524separate rows (or columns) of the semiconductor devices 522, and aplurality of scribe lines 526 separate columns (or rows) of thesemiconductor devices 522. The scribe lines 524 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 5) in the substrate 520,and the scribe lines 526 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 5) in the substrate 520such that the scribe lines 524 and the scribe lines 526 intersect atvarious locations across the substrate 520.

As further shown in FIG. 5, each of the scribe lines 514, 516, 524, and526 may have a particular width along a short dimension of the scribelines 514, 516, 524, and 526. The scribe lines 514 and 516 may both havea similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 510 and the substrate 520 may experience actinomorphicthermal expansion during a bonding operation due to thermal expansion ofthe substrate 510 and the substrate 520. As a result, the size of eachof the substrate 510 and the substrate 520 may increase in a radiallysymmetric manner such that the respective diameters of the substrate 510and the substrate 520 may increase along the x-axis and along the y-axisillustrated in FIG. 5. Moreover, the substrate 510 may be referred to asa low expansion wafer and the substrate 520 may be referred to as a highexpansion wafer in that the substrate 520 may have an expansion ratethat is greater relative to the expansion rate of the substrate 510. Tocompensate for the greater actinomorphic thermal expansion of thesubstrate 520, the scribe lines 524 and the scribe lines 526 may havewidths that are lesser relative to the width (w1) of the scribe lines514 and 516.

The decreased widths of the scribe lines 526 relative to the scribelines 516 may result in the semiconductor devices 512 and thesemiconductor devices 522 starting out as misaligned along the x-axis(e.g., in the first direction) in a bonding operation to bond thesubstrate 510 with the substrate 520. However, as the substrate 510 andthe substrate 520 are heated in the bonding operation (which causes thesubstrate 510 and the substrate 520 to expand), the combination of thedecreased widths of the scribe lines 526 and the greater expansion rateof the substrate 520 results in the semiconductor devices 512 and thesemiconductor devices 522 moving into approximate alignment along thex-axis.

Similarly, the decreased widths of the scribe lines 524 relative to thescribe lines 514 may result in the semiconductor devices 512 and thesemiconductor devices 522 starting out as misaligned along the y-axis(e.g., in the second direction) in a bonding operation to bond thesubstrate 510 with the substrate 520. However, as the substrate 510 andthe substrate 520 are heated in the bonding operation (which causes thesubstrate 510 and the substrate 520 to expand), the combination of thedecreased widths of the scribe lines 524 and the greater expansion rateof the substrate 520 results in the semiconductor devices 512 and thesemiconductor devices 522 moving into approximate alignment along they-axis.

To further promote alignment between the semiconductor devices 512 andthe semiconductor devices 522 along the x-axis (e.g., in the firstdirection), the scribe lines 526 may progressively decrease in widthfrom near a center of the substrate 520 toward the edge (or outerperimeter) of the substrate 520. The progressive decrease in width maycompensate for the increasing expansion rate from near a center of thesubstrate 520 toward an edge of the 520 along the x-axis (e.g., in thefirst direction), which may result in greater displacement ofsemiconductor devices 522 near the edge of the substrate 520 relative tosemiconductor devices 522 near the center of the substrate 520 duringbonding. Accordingly, the widths of the scribe lines 526 may decreasetoward the edge of the substrate 520 such that the spacing between thesemiconductor devices 522 decreases toward the edge of the substrate 520to compensate for the greater displacement of the semiconductor devices522 near the edge of the substrate 520 during bonding. In this way, thesubstrate 520 may include a plurality of subsets of the scribe lines526, where each subset has a different width relative to other subsetsof the scribe lines 526.

As an example, the scribe lines 526 may include a first subset 526 a ofone or more scribe lines and a second subset 526 b of one or more scribelines. The first subset 526 a may be located closer to the center of thesubstrate 520 relative to the second subset 526 b. The width (w2) of thesecond subset 526 b of the scribe lines 526 may be lesser relative tothe width (w3) of the first subset 526 a of the scribe lines 526. Insome implementations, the widths of the scribe lines 526 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 520 and decreasing toward the edge of thesubstrate 520. As an example, if the width (w1) of the scribe lines 514and 516 are approximately 100 microns, the width (w3) of the firstsubset 526 a may be in a range of approximately 96 microns toapproximately 99 microns, the width (w2) of the second subset 526 b maybe in a range of approximately 92 microns to approximately 98 microns,and so on. In some implementations, the scribe lines 526 include agreater quantity of subsets of progressively decreasing widths from nearthe center of the substrate 520 toward the edge of the substrate 520.

To further promote alignment between the semiconductor devices 512 andthe semiconductor devices 522 along the y-axis (e.g., in the seconddirection), the scribe lines 524 may progressively decrease in widthfrom near a center of the substrate 520 toward the edge (or outerperimeter) of the substrate 520. The progressive decrease in width maycompensate for the increasing expansion rate from near a center of thesubstrate 520 toward an edge of the substrate 520 along the y-axis(e.g., in the second direction), which may result in greaterdisplacement of semiconductor devices 522 near the edge of the substrate520 relative to semiconductor devices 522 near the center of thesubstrate 520 during bonding. Accordingly, the widths of the scribelines 524 may decrease toward the edge of the substrate 520 such thatthe spacing between the semiconductor devices 522 decreases toward theedge of the substrate 520 along the y-axis (e.g., in the seconddirection) to compensate for the greater displacement of thesemiconductor devices 522 near the edge of the substrate 520 duringbonding. In this way, the substrate 520 may include a plurality ofsubsets of the scribe lines 524, where each subset has a different widthrelative to other subsets of the scribe lines 524.

As an example, the scribe lines 524 may include a first subset 524 a ofone or more scribe lines and a second subset 524 b of one or more scribelines. The first subset 524 a may be located closer to the center of thesubstrate 520 relative to the second subset 524 b. The width (w4) of thesecond subset 524 b of the scribe lines 524 may be lesser relative tothe width (w5) of the first subset 524 a of the scribe lines 524. Insome implementations, the widths of the scribe lines 524 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting fromnear the center of the substrate 520 and decreasing toward the edge ofthe substrate 520. As an example, if the width (w1) of the scribe lines514 and 516 are approximately 100 microns, the width (w5) of the firstsubset 524 a may be in a range of approximately 96 microns toapproximately 99 microns, the width (w4) of the second subset 524 b maybe in a range of approximately 92 microns to approximately 98 microns,and so on. In some implementations, the scribe lines 524 include agreater quantity of subsets of progressively decreasing widths from nearthe center of the substrate 520 to near the edge of the substrate 520.

As indicated above, the scribe lines 524 and 526 may progressivelydecrease in width from near the center of the substrate 520 to near theedge of the substrate 520 to compensate for actinomorphic thermalexpansion of the substrate 520. Accordingly, the decreases in the widthsof the scribe lines 524 and 526 may be approximately equal to compensatefor the radially symmetric thermal expansion of the substrate 520. Insome implementations, the decreases in the widths of the scribe lines524 and 526 may be different to compensate for asymmetric thermalexpansion of the substrate 520, such as in cases where different typesof devices are formed along the x-axis and along the y-axis of thesubstrate 520 (which may result in asymmetric thermal expansion ratesalong the x-axis and the y-axis of the substrate 520).

As indicated above, FIG. 5 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 5.

FIG. 6 is a diagram of an example implementation 600 described herein.The example implementation 600 includes an example in which a first setof scribe lines of progressively increasing widths are included on a lowexpansion rate substrate to compensate for thermal expansion in a firstdirection, and a second set of scribe lines of progressively decreasingwidths are included on a high expansion rate substrate to compensate forthermal expansion in a second direction. In this way, a plurality ofsets of scribe lines may be used to compensate for actinomorphic thermalexpansion to achieve approximate alignment of semiconductor devices onthe two substrates in a plurality of directions.

As shown in FIG. 6, the example implementation 600 may include asubstrate 610 and a substrate 620 that are to be bonded. The substrate610 and the substrate 620 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 610 may include a pluralityof semiconductor devices 612, and the substrate 620 may include aplurality of semiconductor devices 622. The semiconductor devices 612and 620 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 612 and622 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 610 and thesubstrate 620.

The semiconductor devices 612 may be arranged in a grid on the substrate610 such that a plurality of scribe lines 614 separate rows (or columns)of the semiconductor devices 612, and a plurality of scribe lines 616separate columns (or rows) of the semiconductor devices 612. The scribelines 614 may be formed in a first direction (e.g., along the x-axisshown in FIG. 6) in the substrate 610, and the scribe lines 616 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 6) in the substrate 610 such that the scribe lines614 and the scribe lines 616 intersect at various locations across thesubstrate 610. Similarly, the semiconductor devices 622 may be arrangedin a grid on the substrate 620 such that a plurality of scribe lines 624separate rows (or columns) of the semiconductor devices 622, and aplurality of scribe lines 626 separate columns (or rows) of thesemiconductor devices 622. The scribe lines 624 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 6) in the substrate 620,and the scribe lines 626 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 6) in the substrate 620such that the scribe lines 624 and the scribe lines 626 intersect atvarious locations across the substrate 620.

As further shown in FIG. 6, each of the scribe lines 614, 616, 624, and626 may have a particular width along a short dimension of the scribelines 614, 616, 624, and 626. The scribe lines 614 and 626 may both havea similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 610 and the substrate 620 may experience actinomorphicthermal expansion during a bonding operation due to thermal expansion ofthe substrate 610 and the substrate 620. As a result, the size of eachof the substrate 610 and the substrate 620 may increase in a radiallysymmetric manner such that the respective diameters of the substrate 610and the substrate 620 may increase along the x-axis and along the y-axisillustrated in FIG. 6. Moreover, the substrate 610 may be referred to asa low expansion wafer and the substrate 620 may be referred to as a highexpansion wafer in that the substrate 620 may have an expansion ratethat is greater relative to the expansion rate of the substrate 610. Tocompensate for the greater actinomorphic thermal expansion of thesubstrate 620, the scribe lines 616 may have widths that are greaterrelative to the width (w1) of the scribe lines 614 and 626, and thescribe lines 624 may have widths that are lesser relative to the width(w1) of the scribe lines 614 and 626.

The greater widths of the scribe lines 616 and the lesser widths of thescribe lines 624 may result in the semiconductor devices 612 and thesemiconductor devices 622 starting out as misaligned along the x-axis(e.g., in the first direction) and along the y-axis (e.g., in the seconddirection) in a bonding operation to bond the substrate 610 with thesubstrate 620. However, as the substrate 610 and the substrate 620 areheated in the bonding operation (which causes the substrate 610 and thesubstrate 620 to radially expand), the combination of the increasedwidths of the scribe lines 616 and the greater expansion rate of thesubstrate 620 results in the semiconductor devices 612 and thesemiconductor devices 622 moving into approximate alignment along thex-axis. Moreover, the combination of the decreased widths of the scribelines 624 and the greater expansion rate of the substrate 620 results inthe semiconductor devices 612 and the semiconductor devices 622 movinginto approximate alignment along the y-axis.

To further promote alignment between the semiconductor devices 612 andthe semiconductor devices 622 along the x-axis (e.g., in the firstdirection), the scribe lines 616 may progressively increase in widthfrom near a center of the substrate 610 toward the edge (or outerperimeter) of the substrate 610. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 620 toward an edge of the 620 along the x-axis (e.g., in thefirst direction), which may result in greater displacement ofsemiconductor devices 622 near the edge of the substrate 620 relative tosemiconductor devices 622 near the center of the substrate 620 duringbonding. Accordingly, the widths of the scribe lines 616 may increasetoward the edge of the substrate 610 such that the spacing between thesemiconductor devices 612 increases toward the edge of the substrate 610to compensate for the greater displacement of the semiconductor devices622 near the edge of the substrate 620 during bonding. In this way, thesubstrate 610 may include a plurality of subsets of the scribe lines616, where each subset has a different width relative to other subsetsof the scribe lines 616.

As an example, the scribe lines 616 may include a first subset 616 a ofone or more scribe lines and a second subset 616 b of one or more scribelines. The first subset 616 a may be located closer to the center of thesubstrate 610 relative to the second subset 616 b. The width (w2) of thesecond subset 616 b of the scribe lines 616 may be greater relative tothe width (w3) of the first subset 616 a of the scribe lines 616. Insome implementations, the widths of the scribe lines 616 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 610 and increasing toward the edge of thesubstrate 610. As an example, if the width (w1) of the scribe lines 614and 626 are approximately 80 microns, the width (w3) of the first subset526 a may be in a range of approximately 81 microns to approximately 84microns, the width (w2) of the second subset 616 b may be in a range ofapproximately 82 microns to approximately 88 microns, and so on. In someimplementations, the scribe lines 616 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 610 to near the edge of the substrate 610.

To further promote alignment between the semiconductor devices 612 andthe semiconductor devices 622 along the y-axis (e.g., in the seconddirection), the scribe lines 624 may progressively decrease in widthfrom near a center of the substrate 620 toward the edge (or outerperimeter) of the substrate 620. The progressive decrease in width maycompensate for the increasing expansion rate from near a center of thesubstrate 620 to an edge of the substrate 620 along the y-axis (e.g., inthe second direction), which may result in greater displacement ofsemiconductor devices 622 near the edge of the substrate 620 relative tosemiconductor devices 622 near the center of the substrate 620 duringbonding. Accordingly, the widths of the scribe lines 624 may decreasetoward the edge of the substrate 620 such that the spacing between thesemiconductor devices 622 decreases toward the edge of the substrate 620along the y-axis (e.g., in the second direction) to compensate for thegreater displacement of the semiconductor devices 622 near the edge ofthe substrate 620 during bonding. In this way, the substrate 620 mayinclude a plurality of subsets of the scribe lines 624, where eachsubset has a different width relative to other subsets of the scribelines 624.

As an example, the scribe lines 624 may include a first subset 624 a ofone or more scribe lines and a second subset 624 b of one or more scribelines. The first subset 624 a may be located closer to the center of thesubstrate 620 relative to the second subset 624 b. The width (w4) of thesecond subset 624 b of the scribe lines 624 may be lesser relative tothe width (w5) of the first subset 624 a of the scribe lines 624. Insome implementations, the widths of the scribe lines 624 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting fromnear the center of the substrate 620 and decreasing toward the edge ofthe substrate 620. As an example, if the width (w1) of the scribe lines614 and 626 are approximately 80 microns, the width (w5) of the firstsubset 624 a may be in a range of approximately 76 microns toapproximately 79 microns, the width (w4) of the second subset 624 b maybe in a range of approximately 72 microns to approximately 78 microns,and so on. In some implementations, the scribe lines 624 include agreater quantity of subsets of progressively decreasing widths from nearthe center of the substrate 620 to near the edge of the substrate 620.

As indicated above, the scribe lines 616 may progressively increase inwidth and the scribe lines 624 may progressively decrease in width tocompensate for the difference in actinomorphic thermal expansion betweenthe substrate 610 and the substrate 620. Accordingly, the increases inthe widths of the scribe lines 616 may be approximately equal to thedecreases in the widths of the scribe lines 624 to compensate for theradially symmetric thermal expansion of the substrate 610 and thesubstrate 620. In some implementations, the increases in widths of thescribe lines 616 may be different relative to the decreases in thewidths of the scribe lines 624 to compensate for asymmetric thermalexpansion of the substrate 610 and/or the substrate 620, such as incases where different types of devices are formed along the x-axis andalong the y-axis of the substrate 610 and/or the substrate 620 (whichmay result in asymmetric thermal expansion rates along the x-axis andthe y-axis of the substrate 610 and/or the substrate 620).

As indicated above, FIG. 6 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 6.

FIG. 7 is a diagram of an example implementation 700 described herein.The example implementation 700 may include an example in which scribelines of progressively increasing widths are included on a low expansionrate substrate and scribe lines of progressively decreasing widths areincluded on a high expansion rate substrate. The scribe lines ofprogressively increasing widths and the scribe lines of progressivelydecreasing widths are arranged in the same direction (e.g., along thesame axis) to compensate for the differences in thermal expansion of thelow expansion rate substrate and the high expansion rate substrate. Inthis way, the scribe lines of progressively increasing widths in the lowexpansion rate substrate and the scribe lines of progressivelydecreasing widths in the high expansion rate substrate may be used tocompensate for large differences in expansion rates in a singledirection between the low expansion rate substrate and the highexpansion rate substrate (e.g., may be used to compensate for greaterdifferences in expansion rates relative to including only the scribelines of progressively increasing widths or only the scribe lines ofprogressively decreasing widths).

As shown in FIG. 7, the example implementation 700 may include asubstrate 710 and a substrate 720 that are to be bonded. The substrate710 and the substrate 720 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 710 may include a pluralityof semiconductor devices 712, and the substrate 720 may include aplurality of semiconductor devices 722. The semiconductor devices 712and 720 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 712 and722 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 710 and thesubstrate 720.

The semiconductor devices 712 may be arranged in a grid on the substrate710 such that a plurality of scribe lines 714 separate rows (or columns)of the semiconductor devices 712, and a plurality of scribe lines 716separate columns (or rows) of the semiconductor devices 712. The scribelines 714 may be formed in a first direction (e.g., along the x-axisshown in FIG. 7) in the substrate 710, and the scribe lines 716 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 7) in the substrate 710 such that the scribe lines714 and the scribe lines 716 intersect at various locations across thesubstrate 710. Similarly, the semiconductor devices 722 may be arrangedin a grid on the substrate 720 such that a plurality of scribe lines 724separate rows (or columns) of the semiconductor devices 722, and aplurality of scribe lines 726 separate columns (or rows) of thesemiconductor devices 722. The scribe lines 724 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 7) in the substrate 720,and the scribe lines 726 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 7) in the substrate 720such that the scribe lines 724 and the scribe lines 726 intersect atvarious locations across the substrate 720.

As further shown in FIG. 7, each of the scribe lines 714, 716, 724, and726 may have a particular width along a short dimension of the scribelines 714, 716, 724, and 726. The scribe lines 714 and 724 may both havea similar width (w1), which may be in a range of approximately 60microns to approximately 80 microns or in a range of approximately 30microns to approximately 100 microns, among other examples.

The substrate 710 may be referred to as a low expansion wafer and thesubstrate 720 may be referred to as a high expansion wafer in that thesubstrate 720 may have an expansion rate that is greater relative to theexpansion rate of the substrate 710. To compensate for the greaterthermal expansion of the substrate 720 along the x-axis shown in FIG. 7,the scribe lines 716 and the scribe lines 726 may have widths that aredifferent relative to the width (w1) of the scribe lines 714 and 724. Inparticular, the widths of the scribe lines 716 may be greater relativeto the width (w1) of the scribe lines 714 and 724 since the substrate710 is a low expansion rate substrate. Moreover, the widths of thescribe lines 726 may be lesser relative to the width (w1) of the scribelines 714 and 725 (as well as the width of the scribe lines 716) sincethe substrate 720 is a high expansion rate substrate. As describedabove, the combination of the greater widths of the scribe lines 716 andthe lesser widths of the scribe lines 726 may enable alignment of thesemiconductor devices 712 and the semiconductor devices 722 bycompensating for larger differences in thermal expansion rates betweenthe substrate 710 and the substrate 720.

The greater widths of the scribe lines 716 and the lesser widths of thescribe lines 726 may result in the semiconductor devices 712 and thesemiconductor devices 722 starting out as misaligned along the x-axis(e.g., in the first direction) in a bonding operation to bond thesubstrate 710 with the substrate 720. However, as the substrate 710 andthe substrate 720 are heated in the bonding operation (which causes thesubstrate 710 and the substrate 720 to expand), the combination of theincreased widths of the scribe lines 716, the decreased widths of thescribe lines 726, and the greater expansion rate of the substrate 720results in the semiconductor devices 712 and the semiconductor devices722 moving into approximate alignment along the x-axis.

To further promote alignment between the semiconductor devices 712 andthe semiconductor devices 722 along the x-axis (e.g., in the firstdirection), the scribe lines 716 may progressively increase in widthfrom near a center of the substrate 710 toward the edge (or outerperimeter) of the substrate 710. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 720 toward an edge of the substrate 720 along the x-axis(e.g., in the first direction), which may result in greater displacementof semiconductor devices 722 near the edge of the substrate 720 relativeto semiconductor devices 722 near the center of the substrate 720 duringbonding. Accordingly, the widths of the scribe lines 716 may increasetoward the edge of the substrate 710 such that the spacing between thesemiconductor devices 712 increases toward the edge of the substrate 710to compensate for the greater displacement of the semiconductor devices722 near the edge of the substrate 720 during bonding. In this way, thesubstrate 710 may include a plurality of subsets of the scribe lines716, where each subset has a different width relative to other subsetsof the scribe lines 716.

As an example, the scribe lines 716 may include a first subset 716 a ofone or more scribe lines and a second subset 716 b of one or more scribelines. The first subset 716 a may be located closer to the center of thesubstrate 710 relative to the second subset 716 b. The width (w2) of thesecond subset 716 b of the scribe lines 716 may be greater relative tothe width (w3) of the first subset 716 a of the scribe lines 716. Insome implementations, the widths of the scribe lines 716 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 710 and increasing toward the edge of thesubstrate 710. As an example, if the width (w1) of the scribe lines 714and 724 are approximately 40 microns, the width (w3) of the first subset716 a may be in a range of approximately 41 microns to approximately 44microns, the width (w2) of the second subset 716 b may be in a range ofapproximately 42 microns to approximately 48 microns, and so on. In someimplementations, the scribe lines 716 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 710 to near the edge of the substrate 710.

Moreover, the scribe lines 726 may progressively decrease in width fromnear a center of the substrate 720 toward the edge (or outer perimeter)of the substrate 720. The progressive decrease in width may compensatefor the increasing expansion rate from near a center of the substrate720 toward an edge of the 720 along the x-axis (e.g., in the firstdirection), which may result in greater displacement of semiconductordevices 722 near the edge of the substrate 720 relative to semiconductordevices 722 near the center of the substrate 720 during bonding.Accordingly, the widths of the scribe lines 726 may decrease toward theedge of the substrate 720 such that the spacing between thesemiconductor devices 722 decreases toward the edge of the substrate 720to compensate for the greater displacement of the semiconductor devices722 near the edge of the substrate 720 during bonding. In this way, thesubstrate 720 may include a plurality of subsets of the scribe lines726, where each subset has a different width relative to other subsetsof the scribe lines 726.

As an example, the scribe lines 726 may include a first subset 726 a ofone or more scribe lines and a second subset 726 b of one or more scribelines. The first subset 726 a may be located closer to the center of thesubstrate 720 relative to the second subset 726 b. The width (w4) of thesecond subset 726 b of the scribe lines 726 may be lesser relative tothe width (w5) of the first subset 726 a of the scribe lines 726. Insome implementations, the widths of the scribe lines 726 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 720 and decreasing to near the edge of thesubstrate 720. As an example, if the width (w1) of the scribe lines 714and 724 are approximately 40 microns, the width (w5) of the first subset726 a may be in a range of approximately 36 microns to approximately 39microns, the width (w4) of the second subset 726 b may be in a range ofapproximately 32 microns to approximately 38 microns, and so on. In someimplementations, the scribe lines 726 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 720 to near the edge of the substrate 720.

In some implementations, the progressive increase in the widths of thescribe lines 716 are equal in magnitude to the progressive decrease inwidths of the scribe lines 726. For example, the widths of the scribelines 716 may progressively increase in 3 micron increments, and thewidths of the scribe lines 726 may decrease in 3 micron decrements. Insome implementations, the progressive increase in the widths of thescribe lines 716 and the progressive decrease in widths of the scribelines 726 are different in magnitude, which may permit more granulartuning of the alignment between the semiconductor devices 712 and thesemiconductor devices 722. For example, the widths of the scribe lines716 may progressively increase in 2 micron increments, and the widths ofthe scribe lines 726 may decrease in 4 micron decrements.

As indicated above, FIG. 7 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 7.

FIG. 8 is a diagram of an example implementation 800 described herein.The example implementation 800 may be similar to the exampleimplementation 700 in that the example implementation 800 includes anexample in which a first set of scribe lines of progressively increasingwidths are included on a low expansion rate substrate and a second setof scribe lines of progressively decreasing widths are included on ahigh expansion rate substrate in a first direction. In addition, a thirdset of scribe lines of progressively increasing widths are included in asecond (e.g., approximately perpendicular) direction on the lowexpansion rate substrate in example implementation 800. The first set ofscribe lines, the second scribe lines, and the third set of scribe linesmay compensate for asymmetric thermal expansion of the high expansionrate substrate and/or the low expansion rate substrate in that thecombination of the first set of scribe lines and the second scribe linesmay compensate for larger differences in thermal expansion along a firstaxis, and the third set of scribe lines may compensate for smallerdifferences in thermal expansion along a second axis.

As shown in FIG. 8, the example implementation 800 may include asubstrate 810 and a substrate 820 that are to be bonded. The substrate810 and the substrate 820 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 810 may include a pluralityof semiconductor devices 812, and the substrate 820 may include aplurality of semiconductor devices 822. The semiconductor devices 812and 820 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 812 and822 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 810 and thesubstrate 820.

The semiconductor devices 812 may be arranged in a grid on the substrate810 such that a plurality of scribe lines 814 separate rows (or columns)of the semiconductor devices 812, and a plurality of scribe lines 816separate columns (or rows) of the semiconductor devices 812. The scribelines 814 may be formed in a first direction (e.g., along the x-axisshown in FIG. 8) in the substrate 810, and the scribe lines 816 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 8) in the substrate 810 such that the scribe lines814 and the scribe lines 816 intersect at various locations across thesubstrate 810. Similarly, the semiconductor devices 822 may be arrangedin a grid on the substrate 820 such that a plurality of scribe lines 824separate rows (or columns) of the semiconductor devices 822, and aplurality of scribe lines 826 separate columns (or rows) of thesemiconductor devices 822. The scribe lines 824 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 8) in the substrate 820,and the scribe lines 826 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 8) in the substrate 820such that the scribe lines 824 and the scribe lines 826 intersect atvarious locations across the substrate 820.

The substrate 810 may be referred to as a low expansion wafer and thesubstrate 820 may be referred to as a high expansion wafer in that thesubstrate 820 may have an expansion rate that is greater relative to theexpansion rate of the substrate 810. To compensate for the greaterthermal expansion of the substrate 820 along the x-axis shown in FIG. 8,the scribe lines 816 and the scribe lines 826 may have widths that aredifferent relative to a width (w1) of the scribe lines 824. Inparticular, the widths of the scribe lines 816 may be greater relativeto the width (w1) of the scribe lines 824 since the substrate 810 is alow expansion rate substrate. Moreover, the widths of the scribe lines826 may be lesser relative to the width (w1) of the scribe lines 824 (aswell as the widths of the scribe lines 816) since the substrate 820 is ahigh expansion rate substrate. As described above, the combination ofthe greater widths of the scribe lines 816 and the decreased widths ofthe scribe lines 826 may enable alignment of the semiconductor devices812 and the semiconductor devices 822 by compensating for largerdifferences in thermal expansion rates between the substrate 810 and thesubstrate 820 along the x-axis (e.g., in a direction that isapproximately perpendicular to the length of the scribe lines 816 andthe scribe lines 826).

To further promote alignment between the semiconductor devices 812 andthe semiconductor devices 822 along the x-axis (e.g., in the firstdirection), the scribe lines 816 may progressively increase in widthfrom near a center of the substrate 810 toward the edge (or outerperimeter) of the substrate 810. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 820 toward an edge of the substrate 820 along the x-axis(e.g., in the first direction), which may result in greater displacementof semiconductor devices 822 near the edge of the substrate 820 relativeto semiconductor devices 822 near the center of the substrate 820 duringbonding. Accordingly, the widths of the scribe lines 816 may increasetoward the edge of the substrate 810 such that the spacing between thesemiconductor devices 812 increases toward the edge of the substrate 810to compensate for the greater displacement of the semiconductor devices822 near the edge of the substrate 820 during bonding. In this way, thesubstrate 810 may include a plurality of subsets of the scribe lines816, where each subset has a different width relative to other subsetsof the scribe lines 816.

As an example, the scribe lines 816 may include a first subset 816 a ofone or more scribe lines and a second subset 816 b of one or more scribelines. The first subset 816 a may be located closer to the center of thesubstrate 810 relative to the second subset 816 b. The width (w2) of thesecond subset 816 b of the scribe lines 816 may be greater relative tothe width (w3) of the first subset 816 a of the scribe lines 816. Insome implementations, the widths of the scribe lines 816 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 810 and increasing to near the edge of thesubstrate 810. As an example, if the width (w1) of the scribe lines 814and 824 are approximately 55 microns, the width (w3) of the first subset816 a may be in a range of approximately 56 microns to approximately 59microns, the width (w2) of the second subset 816 b may be in a range ofapproximately 57 microns to approximately 63 microns, and so on. In someimplementations, the scribe lines 816 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 810 to near the edge of the substrate 810.

Moreover, the scribe lines 826 may progressively decrease in width fromnear a center of the substrate 820 toward the edge (or outer perimeter)of the substrate 820. The progressive decrease in width may compensatefor the increasing expansion rate from near a center of the substrate820 toward an edge of the 820 along the x-axis (e.g., in the firstdirection), which may result in greater displacement of semiconductordevices 822 near the edge of the substrate 820 relative to semiconductordevices 822 near the center of the substrate 820 during bonding.Accordingly, the widths of the scribe lines 816 may decrease toward theedge of the substrate 820 such that the spacing between thesemiconductor devices 822 decreases toward the edge of the substrate 820to compensate for the greater displacement of the semiconductor devices822 near the edge of the substrate 820 during bonding. In this way, thesubstrate 820 may include a plurality of subsets of the scribe lines826, where each subset has a different width relative to other subsetsof the scribe lines 826.

As an example, the scribe lines 826 may include a first subset 826 a ofone or more scribe lines and a second subset 826 b of one or more scribelines. The first subset 826 a may be located closer to the center of thesubstrate 820 relative to the second subset 826 b. The width (w4) of thesecond subset 826 b of the scribe lines 826 may be lesser relative tothe width (w5) of the first subset 826 a of the scribe lines 826. Insome implementations, the widths of the scribe lines 826 mayprogressively decrease in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting nearthe center of the substrate 820 and decreasing toward the edge of thesubstrate 820. As an example, if the width (w1) of the scribe lines 824is approximately 55 microns, the width (w5) of the first subset 826 amay be in a range of approximately 51 microns to approximately 54microns, the width (w4) of the second subset 826 b may be in a range ofapproximately 47 microns to approximately 53 microns, and so on. In someimplementations, the scribe lines 826 include a greater quantity ofsubsets of progressively decreasing widths from near the center of thesubstrate 820 to near the edge of the substrate 820.

In some implementations, the progressive increase in the widths of thescribe lines 816 are equal in magnitude to the progressive decrease inwidths of the scribe lines 826. In some implementations, the progressiveincrease in the widths of the scribe lines 816 and the progressivedecrease in widths of the scribe lines 826 are different in magnitude,which may permit more granular tuning of the alignment between thesemiconductor devices 812 and the semiconductor devices 822.

To further promote alignment between the semiconductor devices 812 andthe semiconductor devices 822 along the y-axis (e.g., in the seconddirection), the scribe lines 814 may progressively increase in widthfrom near a center of the substrate 810 toward the edge (or outerperimeter) of the substrate 810. The progressive increase in width maycompensate for the increasing expansion rate from near a center of thesubstrate 820 toward an edge of the substrate 820 along the y-axis(e.g., in the second direction), which may result in greaterdisplacement of semiconductor devices 822 near the edge of the substrate820 relative to semiconductor devices 822 near the center of thesubstrate 820 during bonding. Accordingly, the widths of the scribelines 814 may increase toward the edge of the substrate 810 such thatthe spacing between the semiconductor devices 812 increases toward theedge of the substrate 810 to compensate for the greater displacement ofthe semiconductor devices 822 near the edge of the substrate 820 duringbonding. In this way, the substrate 810 may include a plurality ofsubsets of the scribe lines 814, where each subset has a different widthrelative to other subsets of the scribe lines 814.

As an example, the scribe lines 814 may include a first subset 814 a ofone or more scribe lines and a second subset 814 b of one or more scribelines. The first subset 814 a may be located closer to the center of thesubstrate 810 relative to the second subset 814 b. The width (w6) of thesecond subset 814 b of the scribe lines 814 may be greater relative tothe width (w7) of the first subset 814 a of the scribe lines 814. Insome implementations, the widths of the scribe lines 814 mayprogressively increase in a range of approximately 1 micron toapproximately 4 microns from scribe line to scribe line starting fromnear the center of the substrate 810 and increasing toward the edge ofthe substrate 810. As an example, if the width (w1) of the scribe lines824 is approximately 55 microns, the width (w7) of the first subset 814a may be in a range of approximately 56 microns to approximately 59microns, the width (w6) of the second subset 814 b may be in a range ofapproximately 57 microns to approximately 63 microns, and so on. In someimplementations, the scribe lines 814 include a greater quantity ofsubsets of progressively increasing widths from near the center of thesubstrate 810 to near the edge of the substrate 810.

As indicated above, the scribe lines 814 and 816 may progressivelyincrease in width from near the center of the substrate 810 toward theedge of the substrate 810 to compensate for actinomorphic thermalexpansion of the substrate 820. Accordingly, the increases in the widthsof the scribe lines 814 and 816 may be approximately equal to compensatefor the radially symmetric thermal expansion of the substrate 820. Insome implementations, the increases in the widths of the scribe lines814 and 816 may be different to compensate for asymmetric thermalexpansion of the substrate 810, such as in cases where different typesof devices are formed along the x-axis and along the y-axis of thesubstrate 820 (which may result in asymmetric thermal expansion ratesalong the x-axis and the y-axis of the substrate 820).

As indicated above, FIG. 8 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 8.

FIG. 9 is a diagram of an example implementation 900 described herein.The example implementation 900 is an example in which a plurality ofsets of scribe lines are included in a plurality of directions in eachsubstrate to be bonded. This may enable compensation for largerdifferences in thermal expansion along a plurality of axes and/or mayenable more granular adjustments for semiconductor device alignment.

As shown in FIG. 9, the example implementation 900 may include asubstrate 910 and a substrate 920 that are to be bonded. The substrate910 and the substrate 920 may be bonded using one or more of the bondingtechniques described herein, such as eutectic bonding, fusion (ordirect) bonding, hybrid bonding, or another type of semiconductorsubstrate bonding technique. The substrate 910 may include a pluralityof semiconductor devices 912, and the substrate 920 may include aplurality of semiconductor devices 922. The semiconductor devices 912and 920 may be formed by one or more semiconductor processing techniquesdescribed herein. Respective pairs of the semiconductor devices 912 and922 may be formed into three-dimensional semiconductor devices thatinclude transistors, memory devices, MEMS, ASICs, SoCs, and/or othertypes of semiconductor devices by bonding the substrate 910 and thesubstrate 920.

The semiconductor devices 912 may be arranged in a grid on the substrate910 such that a plurality of scribe lines 914 separate rows (or columns)of the semiconductor devices 912, and a plurality of scribe lines 916separate columns (or rows) of the semiconductor devices 912. The scribelines 914 may be formed in a first direction (e.g., along the x-axisshown in FIG. 9) in the substrate 910, and the scribe lines 916 may beformed in a second (e.g., perpendicular) direction (e.g., along they-axis shown in FIG. 9) in the substrate 910 such that the scribe lines914 and the scribe lines 916 intersect at various locations across thesubstrate 910. Similarly, the semiconductor devices 922 may be arrangedin a grid on the substrate 920 such that a plurality of scribe lines 924separate rows (or columns) of the semiconductor devices 922, and aplurality of scribe lines 926 separate columns (or rows) of thesemiconductor devices 922. The scribe lines 924 may be formed in a firstdirection (e.g., along the x-axis shown in FIG. 9) in the substrate 920,and the scribe lines 926 may be formed in a second (e.g., perpendicular)direction (e.g., along the y-axis shown in FIG. 9) in the substrate 920such that the scribe lines 924 and the scribe lines 926 intersect atvarious locations across the substrate 920.

The substrate 910 may be referred to as a low expansion wafer and thesubstrate 920 may be referred to as a high expansion wafer in that thesubstrate 920 may have an expansion rate that is greater relative to theexpansion rate of the substrate 910. To compensate for the greaterthermal expansion of the substrate 920 along the x-axis shown in FIG. 9,the scribe lines 916 may have widths that progressively increase fromnear a center of the substrate 910 toward an edge of the substrate 910,and the scribe lines 926 may have widths that progressively decreasefrom near a center of the substrate 920 toward an edge of the substrate920. To compensate for the greater thermal expansion of the substrate920 along the y-axis shown in FIG. 9, the scribe lines 914 may havewidths that progressively increase from near the center of the substrate910 toward the edge of the substrate 910, and the scribe lines 924 mayhave widths that progressively decrease from near the center of thesubstrate 920 toward the edge of the substrate 920.

The scribe lines 916 may include a first subset 916 a of one or morescribe lines and a second subset 916 b of one or more scribe lines. Thefirst subset 916 a may be located closer to the center of the substrate910 relative to the second subset 916 b. The width (w1) of the secondsubset 916 b of the scribe lines 916 may be greater relative to thewidth (w2) of the first subset 916 a of the scribe lines 916. In someimplementations, the widths of the scribe lines 916 may progressivelyincrease in a range of approximately 1 micron to approximately 4 micronsfrom scribe line to scribe line starting near the center of thesubstrate 910 and increasing toward the edge of the substrate 910.

The scribe lines 926 may include a first subset 926 a of one or morescribe lines and a second subset 926 b of one or more scribe lines. Thefirst subset 926 a may be located closer to the center of the substrate920 relative to the second subset 926 b. The width (w3) of the secondsubset 926 b of the scribe lines 926 may be lesser relative to the width(w4) of the first subset 926 a of the scribe lines 926. In someimplementations, the widths of the scribe lines 926 may progressivelydecrease in a range of approximately 1 micron to approximately 4 micronsfrom scribe line to scribe line starting near the center of thesubstrate 920 and decreasing toward the edge of the substrate 920.

The scribe lines 914 may include a first subset 914 a of one or morescribe lines and a second subset 914 b of one or more scribe lines. Thefirst subset 914 a may be located closer to the center of the substrate910 relative to the second subset 914 b. The width (w5) of the secondsubset 914 b of the scribe lines 914 may be greater relative to thewidth (w6) of the first subset 914 a of the scribe lines 914. In someimplementations, the widths of the scribe lines 914 may progressivelyincrease in a range of approximately 1 micron to approximately 4 micronsfrom scribe line to scribe line starting near the center of thesubstrate 910 and increasing toward the edge of the substrate 910.

The scribe lines 924 may include a first subset 924 a of one or morescribe lines and a second subset 924 b of one or more scribe lines. Thefirst subset 924 a may be located closer to the center of the substrate920 relative to the second subset 924 b. The width (w7) of the secondsubset 924 b of the scribe lines 924 may be lesser relative to the width(w8) of the first subset 924 a of the scribe lines 924. In someimplementations, the widths of the scribe lines 924 may progressivelydecrease in a range of approximately 1 micron to approximately 4 micronsfrom scribe line to scribe line starting near the center of thesubstrate 920 and decreasing toward the edge of the substrate 920.

In some implementations, the progressive increase in the widths of thescribe lines 916 are equal in magnitude to the progressive decrease inwidths of the scribe lines 926. In some implementations, the progressiveincrease in the widths of the scribe lines 916 and the progressivedecrease in widths of the scribe lines 926 are different in magnitude,which may permit more granular tuning of the alignment between thesemiconductor devices 912 and the semiconductor devices 922.

In some implementations, the progressive increase in the widths of thescribe lines 914 are equal in magnitude to the progressive decrease inwidths of the scribe lines 924. In some implementations, the progressiveincrease in the widths of the scribe lines 914 and the progressivedecrease in widths of the scribe lines 924 are different in magnitude,which may permit more granular tuning of the alignment between thesemiconductor devices 912 and the semiconductor devices 922.

As indicated above, FIG. 9 is provided as an example. Other examples maydiffer from what is described with regard to FIG. 9.

FIGS. 10A-10D are diagrams of an example implementation 1000 describedherein. The example implementation 1000 may be an example implementationof bonding a low expansion rate substrate (e.g., one or more of thesubstrates 210-910) and a high expansion rate substrate (e.g., one ormore of the substrates 220-920). As shown in FIG. 10A, the exampleimplementation 1000 may include a processing device 1002. In someimplementations, the processing device 1002 includes a processor, acomputing device, and/or a controller, among other examples. In someimplementations, the processing device 1002 is included in the bondingtool 110. In some implementations, the processing device 1002 isseparate from the bonding tool 110 and is communicatively coupled to thebonding tool 110 (e.g., by a direct connection or a network). In someimplementations, the processing device 1002 is included in another tool,such as a wafer analysis tool, a scanning electron microscopy (SEM)device, a transmission electron microscopy (TEM) device, and/or anothertool.

As further shown in FIG. 10A, and by reference number 1004, the bondingtool 110 may perform a plurality of bonding operations to bond a firstplurality of semiconductor devices on a first plurality of substrates(e.g., a plurality of low expansion rate substrates) with a secondplurality of semiconductor devices on a second plurality of substrates(e.g., a plurality of high expansion rate substrates). The bondingoperations may include fusion bonding operations, eutectic bondingoperations, and/or one or more other types of bonding operations.

The processing device 1002 may receive information associated with theplurality of bonding operations. Additional and/or alternatively, theprocessing device 1002 may generate the information associated with theplurality of bonding operations. The information may include SEM imagesof the plurality of first substrates and the plurality of secondsubstrates after the plurality of first substrates and the plurality ofsecond substrates are bonded, TEM images of the plurality of firstsubstrates and the plurality of second substrates after the plurality offirst substrates and the plurality of second substrates are bonded,and/or other types of information.

As further shown in FIG. 10A, and by reference number 1006, theprocessing device 1002 may generate thermal expansion data for the firstplurality of substrates and thermal expansion data for the secondplurality of substrates based on the information associated with theplurality of bonding operations. The first plurality of substrates mayinclude the same type of substrate such that thermal expansion data maybe generated across a plurality of bonding operations for the same typeof substrate. Similarly, the second plurality of substrates may includethe same type of substrate such that thermal expansion data may begenerated across a plurality of bonding operations for the same type ofsubstrate.

Thermal expansion data for a plurality of substrates may includerespective semiconductor expansion measurements for each of theplurality of substrates. The semiconductor expansion measurements mayinclude, for example, a measurement of an overall expansion in size of asubstrate (e.g., a measurement of the increase in diameter of thesubstrate or a measurement of the increase in a dimension, such as alongan axis, of the substrate), a measurement of displacement of asemiconductor device on the substrate (or measurements of respectivedisplacements at different locations of the substrate), and/or one ormore other types of expansion measurements. In these examples, theprocessing device 1002 may perform the semiconductor expansionmeasurements based on the SEM images and/or the TEM images of theplurality of first substrates and the plurality of second substratesafter the plurality of first substrates and the plurality of secondsubstrates are bonded.

In some implementations, the semiconductor expansion measurementsinclude semiconductor device misalignment measurements across asubstrate (e.g., from near a center of the substrate to near an edge ofthe substrate) in one or more directions or along one or more axes. FIG.10A illustrates an example semiconductor misalignment map generated bythe processing device 1002. The example semiconductor misalignment mapmay visually indicate an amount of misalignment and/or a direction ofmisalignment for various portions of substrates that were bonded by thebonding tool 110. The amount of misalignment may be indicated as apercentage of misalignment or another parameter, and may be visuallyindicated in the misalignment map by different color coding, byhighlighting, by numbering, by shading, and/or by another visualtechnique. As an example, the misalignment map shown in FIG. 10Aincludes a plurality of misalignment regions 1008 a-1008 h, where eachmisalignment region includes a differently colored region in themisalignment map to visually indicate an amount of misalignment and/or adirection of misalignment in the plurality of misalignment regions 1008a-1008 h. In some implementations, the misalignment map may visuallyindicate an amount of misalignment and/or a direction of misalignmentfor each individual pair of semiconductor devices that were bonded.

As shown in FIG. 10B, and by reference number 1010, the processingdevice 1002 may determine adjusted widths for a plurality of scribelines for bonding a third substrate and a fourth substrate. The thirdsubstrate may be the same type of substrate as the first plurality ofsubstrates, and the fourth substrate may be the same type of substrateas the second plurality of substrates, such that the adjusted widths maybe used to decrease the misalignment between the semiconductor devicesof the third substrate and the fourth substrate. The adjusted widths maybe relative to the widths of the scribe lines on the plurality of firstsubstrates and/or on the plurality of second substrates. For example,the processing device 1002 may determine an adjusted width ofapproximately 84 microns for a scribe line on the third substrate, whichmay correspond to a scribe line on the plurality of first substrateshaving a width of approximately 80 microns. The processing device 1002may determine adjusted widths for one or more of the scribe lines on theplurality of first substrates and/or on the plurality of secondsubstrates. The processing device 1002 may determine the adjusted widthsbased on the thermal expansion data for the first plurality ofsubstrates and the thermal expansion data for the second plurality ofsubstrates. The adjusted widths may be overlayed on the misalignmentmap, as shown in the example in FIG. 10B. As an example, the adjustedwidths may be visually indicated as a plurality of adjustment regions1012 a-1012 f on the misalignment map, where each adjustment regioncorresponds to an amount and direction (e.g., an increase in width or adecrease in width) of width adjustment.

In some implementations, the processing device 1002 determines theadjusted widths by determining an adjustment parameter based on therespective semiconductor expansion measurements for each of the firstplurality of substrates and the respective semiconductor expansionmeasurements for each of the second plurality of substrates, anddetermining the adjusted widths for the plurality of scribe lines basedon the adjustment parameter.

As an example, the thermal expansion data for the first plurality ofsubstrates may indicate a substrate expansion of a microns for the firstplurality of substrates, and the thermal expansion data for the secondplurality of substrates may indicate a substrate expansion of b micronsfor the second plurality of substrates. The scribe lines across thethird substrate (e.g., the low expansion substrate) may be numbered from1 to x from near the center of the third substrate toward an edge of thethird substrate. The processing device 1002 may determine the respectivewidths of the scribe lines from near the center of the third substrateto near the edge of the third substrate as y+1z, y+2z, . . . y+xz, wherey corresponds to the width of an un-adjusted scribe line on the firstplurality of substrates and z corresponds to the adjustment parameterfor the third substrate. The processing device 1002 may determine thetotal scribe line increase for the third substrate based on:

(1+x)xz/2

The processing device 1002 may determine the adjustment parameter (z)such that:

$\frac{\left( {1 + x} \right)xz}{2} = {b - a}$

The processing device 1002 may determine respective widths of the scribelines from near a center of the fourth substrate (e.g., the highexpansion substrate) to near an edge of the fourth substrate as y−1z,y−2z, . . . y−xz based on the adjustment parameter.

In some implementations, the processing device 1002 uses machinelearning and/or neural network processing for decision making whendetermining the adjustment parameter and/or the one or more adjustedwidths. Machine learning involves computers learning from data toperform tasks and/or to make decisions. Machine learning algorithms areused to train machine learning models based on sample data, known as“training data.” Once trained, machine learning models may be used tomake predictions, decisions, or classifications relating to newobservations. Here, the processing device 1002 may train a machinelearning model on the cycle-to-cycle thermal expansion data of theplurality of first substrates and the plurality of second substrates,adjusted widths from one or more historical bonding operations, and/orother types of data. Alternatively, a separate device (e.g., a serverdevice) may train the machine learning model and may provide the trainedmachine learning model for use by the processing device 1002.

The machine learning model may be trained on the data from thousands (ormore) of bonding operations using a supervised learning technique and/oran unsupervised learning technique. In some implementations, theprocessing device 1002 trains a regression model, a decision tree model,a Naïve Bayes classifier, a k nearest neighbor (KNN) model, or anothertype of supervised machine learning model by specifying a target oroutcome variable that is to be predicted from an independent set ofvariables. In some implementations, the processing device 1002 uses aneural network (e.g., an artificial neural network that includesthousands or millions (or more) of artificial neurons or processingnodes) to train the machine learning model using a deep learningtechnique. The nodes in the neural network may be layered and weighted.A node in a layer of the neural network may be connected to a pluralityof nodes in a lower layer of the neural network, and may receive aweight from each of the nodes in the lower layer. The node may updatethe weights and feed forward a weight to one or more nodes in a higherlayer in the neural network if the weight satisfies a threshold (whichmay be referred to as a “firing” of the node). The weights in the neuralnetwork may be adjusted and/or updated as the neural network continuesto process the training data provided to the machine learning modeluntil similar training data parameters yield similar weights through theneural network.

The machine learning model may generate a function that maps inputs tothe machine learning model (e.g., the cycle-to-cycle thermal expansiondata of the plurality of first substrates and the plurality of secondsubstrates, adjusted widths from one or more historical bondingoperations, and/or other types of data) to specified outputs from themachine learning model (e.g., alignment outcomes for the semiconductordevices included on the third substrate and on the fourth substrate). Inthis way, the processing device 1002 uses the function (e.g., determinedby the machine learning model) to determine the adjustment parameterand/or the one or more adjusted widths.

As shown in FIG. 10C, the processing device 1002 may provide anindication of the adjusted widths for forming a plurality of scribelines for bonding a third substrate and a fourth substrate to one ormore semiconductor processing tools (e.g., one or more of thesemiconductor processing tools 102-108). As shown by reference number1014, one or more semiconductor processing tools (e.g., one or more ofthe semiconductor processing tools 102-108) may form the plurality ofscribe lines in the third substrate and/or the fourth substrate based onthe adjusted widths. In some implementations, the one or moresemiconductor processing tools form the plurality of scribe lines asshown in one or more of the example implementations 200-900 describedabove. For example, the one or more semiconductor processing tools formthe plurality of scribe lines in one or more directions in the thirdsubstrate and/or in the fourth substrate such that the plurality ofscribe lines progressively increase or progressively decrease tocompensate for thermal expansion of the third substrate and thermalexpansion of the fourth substrate.

As shown in FIG. 10D, and by reference number 1016, the bonding tool 110may bond the third substrate and the fourth substrate. The bonding tool110 may bond the third substrate and the fourth substrate after theplurality of scribe lines are formed in the third substrate and/or inthe fourth substrate based on the adjusted widths.

As indicated above, FIGS. 10A-10D are provided as an example. Otherexamples may differ from what is described with regard to FIGS. 10A-10D.

FIG. 11 is a diagram of example components of a device 1100. In someimplementations, the semiconductor processing tools 102-110, thewafer/die transport tool 112, and/or the processing device 1002 mayinclude (or may be included in) one or more devices 1100 and/or one ormore components of device 1100. As shown in FIG. 11, device 1100 mayinclude a bus 1110, a processor 1120, a memory 1130, a storage component1140, an input component 1150, an output component 1160, and acommunication component 1170.

Bus 1110 includes a component that enables wired and/or wirelesscommunication among the components of device 1100. Processor 1120includes a central processing unit, a graphics processing unit, amicroprocessor, a controller, a microcontroller, a digital signalprocessor, a field-programmable gate array, an application-specificintegrated circuit, and/or another type of processing component.Processor 1120 is implemented in hardware, firmware, or a combination ofhardware and software. In some implementations, processor 1120 includesone or more processors capable of being programmed to perform afunction. Memory 1130 includes a random access memory, a read onlymemory, and/or another type of memory (e.g., a flash memory, a magneticmemory, and/or an optical memory).

Storage component 1140 stores information and/or software related to theoperation of device 1100. For example, storage component 1140 mayinclude a hard disk drive, a magnetic disk drive, an optical disk drive,a solid state disk drive, a compact disc, a digital versatile disc,and/or another type of non-transitory computer-readable medium. Inputcomponent 1150 enables device 1100 to receive input, such as user inputand/or sensed inputs. For example, input component 1150 may include atouch screen, a keyboard, a keypad, a mouse, a button, a microphone, aswitch, a sensor, a global positioning system component, anaccelerometer, a gyroscope, and/or an actuator. Output component 1160enables device 1100 to provide output, such as via a display, a speaker,and/or one or more light-emitting diodes. Communication component 1170enables device 1100 to communicate with other devices, such as via awired connection and/or a wireless connection. For example,communication component 1170 may include a receiver, a transmitter, atransceiver, a modem, a network interface card, and/or an antenna.

Device 1100 may perform one or more processes described herein. Forexample, a non-transitory computer-readable medium (e.g., memory 1130and/or storage component 1140) may store a set of instructions (e.g.,one or more instructions, code, software code, and/or program code) forexecution by processor 1120. Processor 1120 may execute the set ofinstructions to perform one or more processes described herein. In someimplementations, execution of the set of instructions, by one or moreprocessors 1120, causes the one or more processors 1120 and/or thedevice 1100 to perform one or more processes described herein. In someimplementations, hardwired circuitry may be used instead of or incombination with the instructions to perform one or more processesdescribed herein. Thus, implementations described herein are not limitedto any specific combination of hardware circuitry and software.

The number and arrangement of components shown in FIG. 11 are providedas an example. Device 1100 may include additional components, fewercomponents, different components, or differently arranged componentsthan those shown in FIG. 11. Additionally, or alternatively, a set ofcomponents (e.g., one or more components) of device 1100 may perform oneor more functions described as being performed by another set ofcomponents of device 1100.

FIG. 12 is a flowchart of an example process 1200 associated with waferbonding alignment. In some implementations, one or more process blocksof FIG. 12 may be performed by one or more semiconductor processingtools (e.g., the one or more semiconductor processing tools 102-110). Insome implementations, one or more process blocks of FIG. 12 may beperformed by another device or a group of devices separate from orincluding the one or more semiconductor processing tools, such as theprocessing device 1002. Additionally, or alternatively, one or moreprocess blocks of FIG. 12 may be performed by one or more components ofdevice 1100, such as processor 1120, memory 1130, storage component1140, input component 1150, output component 1160, and/or communicationcomponent 1170.

As shown in FIG. 12, process 1200 may include forming a first pluralityof semiconductor devices of a first substrate (block 1210). For example,the one or more semiconductor processing tools 102-110 may form a firstplurality of semiconductor devices (e.g., the semiconductor devices 212,312, 612, and/or 712) of a first substrate (e.g., the substrate 210,310, 610, and/or 710), as described above.

As further shown in FIG. 12, process 1200 may include forming a firstplurality of scribe lines, between the first plurality of semiconductordevices, in a first direction in the first substrate (block 1220). Forexample, the one or more semiconductor processing tools 102-110 may forma first plurality of scribe lines (e.g., the scribe lines 214, 314, 614,and/or 714), between the first plurality of semiconductor devices, in afirst direction in the first substrate, as described above.

As further shown in FIG. 12, process 1200 may include forming a secondplurality of scribe lines, between the first plurality of semiconductordevices, in a second direction in the first substrate, where a firstwidth of a first subset of the second plurality of scribe lines isgreater relative to a second width of a second subset of the secondplurality of scribe lines (block 1230). For example, the one or moresemiconductor processing tools 102-110 may form a second plurality ofscribe lines (e.g., the scribe lines 216, 316, 616, 716), between thefirst plurality of semiconductor devices, in a second direction in thefirst substrate, as described above. In some implementations, a firstwidth of a first subset (e.g., the subset 216 b, 316 b, 616 b, and/or716 b) of the second plurality of scribe lines is greater relative to asecond width of a second subset (e.g., the subset 216 a, 316 a, 616 a,and/or 716 a) of the second plurality of scribe lines.

As further shown in FIG. 12, process 1200 may include performing abonding operation to bond the first plurality of semiconductor devicesand a second plurality of semiconductor devices of a second substrate,where the first width being greater relative to the second width, andthe first width and the second width being greater relative to a thirdwidth of a third plurality of scribe lines between the second pluralityof semiconductor devices, result in approximate alignment of the firstplurality of semiconductor devices and the second plurality ofsemiconductor devices during the bonding operation (block 1240). Forexample, the one or more semiconductor processing tools 102-110 mayperform a bonding operation to bond the first plurality of semiconductordevices and a second plurality of semiconductor devices (e.g., thesemiconductor devices 222, 322, 622, and/or 722) of a second substrate(e.g., the substrate 220, 320, 620, and/or 720), as described above. Insome implementations, the first width being greater relative to thesecond width, and the first width and the second width being greaterrelative to a third width of a third plurality of scribe lines (e.g.,the scribe lines 226, 326, 626, and/or 726) between the second pluralityof semiconductor devices, result in approximate alignment of the firstplurality of semiconductor devices and the second plurality ofsemiconductor devices during the bonding operation.

Process 1200 may include additional implementations, such as any singleimplementation or any combination of implementations described belowand/or in connection with one or more other processes describedelsewhere herein.

In a first implementation, forming the second plurality of scribe linesincludes forming the second subset of the second plurality of scribelines closer to a center of the first substrate relative to the firstsubset of the second plurality of scribe lines. In a secondimplementation, alone or in combination with the first implementation,forming the first plurality of scribe lines includes forming the firstplurality of scribe lines to a same width as the third width of thethird plurality of scribe lines. In a third implementation, alone or incombination with one or more of the first and second implementations,forming the first plurality of scribe lines includes forming a firstsubset of the first plurality of scribe lines to a fourth width, andforming a second subset of the first plurality of scribe lines to afifth width, wherein the fifth width is greater relative to the fourthwidth.

In a fourth implementation, alone or in combination with one or more ofthe first through third implementations, forming the first plurality ofscribe lines comprises forming the first subset of the first pluralityof scribe lines and the second subset of the first plurality of scribelines such that the fourth width and the fifth width are greaterrelative to a sixth width of a fourth plurality of scribe lines betweenthe second plurality of semiconductor devices. In a fifthimplementation, alone or in combination with one or more of the firstthrough fourth implementations, the third plurality of scribe lines arein the second direction in the second substrate, and process 1200includes forming a fourth plurality of scribe lines (e.g., the scribelines 624), between the second plurality of semiconductor devices, inthe first direction in the second substrate, where a fourth width of afirst subset (e.g., the subset 624 b) of the fourth plurality of scribelines is lesser relative to a fifth width of a second subset (e.g., thesubset 624 a) of the fourth plurality of scribe lines, and where thesecond subset of the fourth plurality of scribe lines are closer to acenter of the second substrate relative to the first subset of thesecond plurality of scribe lines.

In a sixth implementation, alone or in combination with one or more ofthe first through fifth implementations, the third plurality of scribelines are in the second direction in the second substrate, and process1200 includes forming a fourth plurality of scribe lines (e.g., thescribe lines 726), between the second plurality of semiconductordevices, in the first direction in the second substrate, where a fourthwidth of a first subset (e.g., the subset 726 b) of the fourth pluralityof scribe lines is lesser relative to a fifth width of a second subset(e.g., the subset 726 a) of the fourth plurality of scribe lines. In aseventh implementation, alone or in combination with one or more of thefirst through sixth implementations, the second subset of the fourthplurality of scribe lines are closer to a center of the second substraterelative to the first subset of the fourth plurality of scribe lines.

Although FIG. 12 shows example blocks of process 1200, in someimplementations, process 1200 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 12. Additionally, or alternatively, two or more of theblocks of process 1200 may be performed in parallel.

FIG. 13 is a flowchart of an example process 1300 associated with waferbonding alignment. In some implementations, one or more process blocksof FIG. 13 may be performed by one or more semiconductor processingtools (e.g., the one or more semiconductor processing tools 102-110). Insome implementations, one or more process blocks of FIG. 13 may beperformed by another device or a group of devices separate from orincluding the one or more semiconductor processing tools, such as theprocessing device 1002. Additionally, or alternatively, one or moreprocess blocks of FIG. 13 may be performed by one or more components ofdevice 1100, such as processor 1120, memory 1130, storage component1140, input component 1150, output component 1160, and/or communicationcomponent 1170.

As shown in FIG. 13, process 1300 may include forming a first pluralityof semiconductor devices of a first substrate (block 1310). For example,the one or more semiconductor processing tools 102-110 may form a firstplurality of semiconductor devices (e.g., the semiconductor devices 422,522, 822, and/or 922) of a first substrate (e.g., the substrate 420,520, 820, 920), as described above.

As further shown in FIG. 13, process 1300 may include forming a firstplurality of scribe lines, between the first plurality of semiconductordevices, along a first axis of the first substrate (block 1320). Forexample, the one or more semiconductor processing tools 102-110 may forma first plurality of scribe lines (e.g., the scribe lines 424, 524, 824,and/or 924), between the first plurality of semiconductor devices, alonga first axis of the first substrate, as described above.

As further shown in FIG. 13, process 1300 may include forming a secondplurality of scribe lines, between the first plurality of semiconductordevices, along a second axis of the first substrate, where a first widthof a first subset of the second plurality of scribe lines is lesserrelative to a second width of a second subset of the second plurality ofscribe lines (block 1330). For example, the one or more semiconductorprocessing tools 102-110 may form a second plurality of scribe lines(e.g., the scribe lines 426, 526, 826, and/or 926), between the firstplurality of semiconductor devices, along a second axis of the firstsubstrate, as described above. In some implementations, a first width ofa first subset (e.g., the subset 424 b, 524 b, 826 b, and/or 924 b) ofthe second plurality of scribe lines is lesser relative to a secondwidth of a second subset (e.g., the subset 424 a, 524 a, 826 a, and/or924 a) of the second plurality of scribe lines.

As further shown in FIG. 13, process 1300 may include performing abonding operation to bond the first plurality of semiconductor devicesand a second plurality of semiconductor devices of a second substrate,where the first width being lesser relative to the second width, and thefirst width and the second width being lesser relative to a third widthof a third plurality of scribe lines between the second plurality ofsemiconductor devices, result in approximate alignment of the firstplurality of semiconductor devices and the second plurality ofsemiconductor devices during the bonding operation (block 1340). Forexample, the one or more semiconductor processing tools 102-110 mayperform a bonding operation to bond the first plurality of semiconductordevices and a second plurality of semiconductor devices (e.g., thesemiconductor devices 412, 512, 812, and/or 912) of a second substrate(e.g., the substrate 410, 510, 810, and/or 910), as described above. Insome implementations, the first width being lesser relative to thesecond width, and the first width and the second width being lesserrelative to a third width of a third plurality of scribe lines (e.g.,the scribe lines 416, 516, 816, and/or 916) between the second pluralityof semiconductor devices, result in approximate alignment of the firstplurality of semiconductor devices and the second plurality ofsemiconductor devices during the bonding operation.

Process 1300 may include additional implementations, such as any singleimplementation or any combination of implementations described belowand/or in connection with one or more other processes describedelsewhere herein.

In a first implementation, forming the first plurality of scribe linesincludes forming a first subset (e.g., the subset 524 a) of the firstplurality of scribe lines to a fourth width, and forming a second subset(e.g., the subset 524 b) of the first plurality of scribe lines to afifth width, where the fifth width is lesser relative to the fourthwidth. In a second implementation, alone or in combination with thefirst implementation, forming the first plurality of scribe linesincludes forming the first subset of the first plurality of scribe linescloser to a center of the first substrate relative to the second subsetof the first plurality of scribe lines. In a third implementation, aloneor in combination with one or more of the first and secondimplementations, the first width being lesser relative to the secondwidth, and the first width and the second width being lesser relative tothe third width, result in approximate alignment of the first pluralityof semiconductor devices and the second plurality of semiconductordevices along the second axis, and where the fifth width being lesserrelative to the fourth width results in approximate alignment of thefirst plurality of semiconductor devices and the second plurality ofsemiconductor devices along the first axis.

In a fourth implementation, alone or in combination with one or more ofthe first through third implementations, the third plurality of scribelines are along the second axis in the second substrate, a fourth widthof a first subset (e.g., the subset 816 b and/or 916 b) of the thirdplurality of scribe lines is greater relative to a fifth width of asecond subset (e.g., the subset 816 a and/or 916 a) of the thirdplurality of scribe lines, and process 1300 includes forming a fourthplurality of scribe lines (e.g., the scribe lines 814 and/or 914),between the second plurality of semiconductor devices, along the firstaxis in the second substrate, where a sixth width of a first subset(e.g., the subset 814 b and/or 914 b) of the fourth plurality of scribelines is greater relative to a seventh width of a second subset (e.g.,the subset 814 a and/or 914 a) of the fourth plurality of scribe lines.In a fifth implementation, alone or in combination with one or more ofthe first through fourth implementations, seventh widths of the thirdplurality of scribe lines increases from a center of the secondsubstrate to an edge of the second substrate.

Although FIG. 13 shows example blocks of process 1300, in someimplementations, process 1300 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 13. Additionally, or alternatively, two or more of theblocks of process 1300 may be performed in parallel.

FIG. 14 is a flowchart of an example process 1400 associated with waferbonding alignment. In some implementations, one or more process blocksof FIG. 14 may be performed by one or more semiconductor processingtools (e.g., the one or more semiconductor processing tools 102-110). Insome implementations, one or more process blocks of FIG. 14 may beperformed by another device or a group of devices separate from orincluding the one or more semiconductor processing tools, such as theprocessing device 1002. Additionally, or alternatively, one or moreprocess blocks of FIG. 14 may be performed by one or more components ofdevice 1100, such as processor 1120, memory 1130, storage component1140, input component 1150, output component 1160, and/or communicationcomponent 1170.

As shown in FIG. 14, process 1400 may include receiving informationassociated with a plurality of bonding operations to bond a firstplurality of semiconductor devices on a first plurality of substrateswith a second plurality of semiconductor devices on a second pluralityof substrates (block 1410). For example, the processing device 1002 mayreceive information associated with a plurality of bonding operations tobond a first plurality of semiconductor devices (e.g., one or more ofthe semiconductor devices 212-912) on a first plurality of substrates(e.g., one or more of the substrates 210-910) with a second plurality ofsemiconductor devices (e.g., one or more of the semiconductor devices222-922) on a second plurality of substrates (e.g., one or more of thesubstrates 220-920), as described above. The bonding tool 110 mayperform the plurality of bonding operations.

As further shown in FIG. 14, process 1400 may include generating thermalexpansion data for the first plurality of substrates and thermalexpansion data for the second plurality of substrates based on theinformation associated with plurality of bonding operations (block1420). For example, the processing device 1002 may generate thermalexpansion data for the first plurality of substrates and thermalexpansion data for the second plurality of substrates based on theinformation associated with the plurality of bonding operations, asdescribed above.

As further shown in FIG. 14, process 1400 may include determining, basedon the thermal expansion data for the first plurality of substrates andthe thermal expansion data for the second plurality of substrates,adjusted widths for a plurality of scribe lines of at least one of athird substrate or a fourth substrate (block 1430). For example, theprocessing device 1002 may determine, based on the thermal expansiondata for the first plurality of substrates and the thermal expansiondata for the second plurality of substrates, adjusted widths for aplurality of scribe lines (e.g., one or more of the scribe lines214-914, the scribe lines 216-916, the scribe lines 224-924, and/or thescribe lines 226-926) of at least one of a third substrate or a fourthsubstrate, as described above.

As further shown in FIG. 14, process 1400 may include providing anindication of the adjusted widths to one or more semiconductorprocessing tools for forming the plurality of scribe lines based on theadjusted widths (block 1440). For example, the processing device 1002may provide an indication of the adjusted widths to one or moresemiconductor processing tools for forming the plurality of scribe linesbased on the adjusted widths, as described above. The one or moresemiconductor processing tools 102-110 may form the plurality of scribelines based on the adjusted widths.

Process 1400 may include additional implementations, such as any singleimplementation or any combination of implementations described belowand/or in connection with one or more other processes describedelsewhere herein.

In a first implementation, process 1400 includes bonding (e.g., usingthe bonding tool 110) a third plurality of semiconductor devices on thethird substrate with a fourth plurality of semiconductor devices on thefourth substrate after forming the plurality of scribe lines, where theplurality of scribe lines are between at least one of the thirdplurality of semiconductor devices or the fourth plurality ofsemiconductor devices. In a second implementation, alone or incombination with the first implementation, the thermal expansion datafor the first plurality of substrates includes respective semiconductorexpansion measurements for each of the first plurality of substrates,and the thermal expansion data for the second plurality of substratesincludes respective semiconductor expansion measurements for each of thesecond plurality of substrates. In a third implementation, alone or incombination with one or more of the first and second implementations,determining the adjusted widths for plurality of scribe lines includesdetermining an adjustment parameter based on the respectivesemiconductor expansion measurements for each of the first plurality ofsubstrates and the respective semiconductor expansion measurements foreach of the second plurality of substrates, and determining the adjustedwidths for the plurality of scribe lines based on the adjustmentparameter.

In a fourth implementation, alone or in combination with one or more ofthe first through third implementations, forming the plurality of scribelines includes forming a first subset of the plurality of scribe linesin the third substrate along a first axis, and forming a second subsetof the plurality of scribe lines in the third substrate along a secondaxis approximately perpendicular to the first axis. In a fifthimplementation, alone or in combination with one or more of the firstthrough fourth implementations, forming the plurality of scribe linesincludes forming a first subset of the plurality of scribe lines in thethird substrate, and forming a second subset of the plurality of scribelines in the fourth substrate.

Although FIG. 14 shows example blocks of process 1400, in someimplementations, process 1400 may include additional blocks, fewerblocks, different blocks, or differently arranged blocks than thosedepicted in FIG. 14. Additionally, or alternatively, two or more of theblocks of process 1400 may be performed in parallel.

In this way, bonding alignment of devices formed on substrates that areto be bonded may be achieved through the use of scribe lines between thedevices, where the scribe lines progressively increase or decrease insize from a center to an edge of one or more of the substrates tocompensate for differences in the thermal expansion rates of thesubstrates. The devices on the substrates are brought into alignment asthe substrates are heated during a bonding operation due to theprogressively increased or decreased sizes of the scribe lines. Thescribe lines may be arranged in a single direction in a substrate tocompensate for thermal expansion along a single axis of the substrate ormay be arranged in a plurality of directions to compensate foractinomorphic thermal expansion. In this way, the techniques andapparatuses described herein may reduce device pattern misalignment, mayincrease bonding strength between substrates that are bonded, mayincrease the structural integrity and electrical connections of thedevices, and/or may reduce device failures of the substrates.

As described in greater detail above, some implementations describedherein provide a method. The method includes forming a first pluralityof semiconductor devices of a first substrate. The method includesforming a first plurality of scribe lines, between the first pluralityof semiconductor devices, in a first direction in the first substrate.The method includes forming a second plurality of scribe lines, betweenthe first plurality of semiconductor devices, in a second direction inthe first substrate, where a first width of a first subset of the secondplurality of scribe lines is greater relative to a second width of asecond subset of the second plurality of scribe lines. The methodincludes performing a bonding operation to bond the first plurality ofsemiconductor devices and a second plurality of semiconductor devices ofa second substrate, where the first width being greater relative to thesecond width, and the first width and the second width being greaterrelative to a third width of a third plurality of scribe lines betweenthe second plurality of semiconductor devices, result in approximatealignment of the first plurality of semiconductor devices and the secondplurality of semiconductor devices during the bonding operation.

As described in greater detail above, some implementations describedherein provide a method. The method includes forming a first pluralityof semiconductor devices of a first substrate. The method includesforming a first plurality of scribe lines, between the first pluralityof semiconductor devices, along a first axis of the first substrate. Themethod includes forming a second plurality of scribe lines, between thefirst plurality of semiconductor devices, along a second axis of thefirst substrate, where a first width of a first subset of the secondplurality of scribe lines is lesser relative to a second width of asecond subset of the second plurality of scribe lines. The methodincludes performing a bonding operation to bond the first plurality ofsemiconductor devices and a second plurality of semiconductor devices ofa second substrate, where the first width being lesser relative to thesecond width, and the first width and the second width being lesserrelative to a third width of a third plurality of scribe lines betweenthe second plurality of semiconductor devices, result in approximatealignment of the first plurality of semiconductor devices and the secondplurality of semiconductor devices during the bonding operation.

As described in greater detail above, some implementations describedherein provide a method. The method includes receiving, by a processingdevice, information associated with a plurality of operations to bond afirst plurality of semiconductor devices on a first plurality ofsubstrates with a second plurality of semiconductor devices on a secondplurality of substrates. The method includes generating, by a processingdevice, thermal expansion data for the first plurality of substrates andthermal expansion data for the second plurality of substrates based onthe information associated with the plurality of bonding operations. Themethod includes determining, by the processing device and based on thethermal expansion data for the first plurality of substrates and thethermal expansion data for the second plurality of substrates, adjustedwidths for a plurality of scribe lines of at least one of a thirdsubstrate or a fourth substrate. The method includes providing, by theprocessing device, an indication of the adjusted widths to one or moresemiconductor processing tools for forming the plurality of scribe linesbased on the adjusted widths.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method, comprising: forming a first pluralityof semiconductor devices of a first substrate; forming a first pluralityof scribe lines, between the first plurality of semiconductor devices,in a first direction in the first substrate; forming a second pluralityof scribe lines, between the first plurality of semiconductor devices,in a second direction in the first substrate, wherein a first width of afirst subset of the second plurality of scribe lines is greater relativeto a second width of a second subset of the second plurality of scribelines; and performing a bonding operation to bond the first plurality ofsemiconductor devices and a second plurality of semiconductor devices ofa second substrate, wherein the first width being greater relative tothe second width, and the first width and the second width being greaterrelative to a third width of a third plurality of scribe lines betweenthe second plurality of semiconductor devices, result in approximatealignment of the first plurality of semiconductor devices and the secondplurality of semiconductor devices during the bonding operation.
 2. Themethod of claim 1, wherein forming the second plurality of scribe linescomprises: forming the second subset of the second plurality of scribelines closer to a center of the first substrate relative to the firstsubset of the second plurality of scribe lines.
 3. The method of claim1, wherein forming the first plurality of scribe lines comprises:forming the first plurality of scribe lines to a same width as the thirdwidth of the third plurality of scribe lines.
 4. The method of claim 1,wherein forming the first plurality of scribe lines comprises: forming afirst subset of the first plurality of scribe lines to a fourth width;and forming a second subset of the first plurality of scribe lines to afifth width, wherein the fifth width is greater relative to the fourthwidth.
 5. The method of claim 4, wherein forming the first plurality ofscribe lines comprises: forming the first subset of the first pluralityof scribe lines and the second subset of the first plurality of scribelines such that the fourth width and the fifth width are greaterrelative to a sixth width of a fourth plurality of scribe lines betweenthe second plurality of semiconductor devices.
 6. The method of claim 1,wherein the third plurality of scribe lines are in the second directionin the second substrate; and wherein the method further comprises:forming a fourth plurality of scribe lines, between the second pluralityof semiconductor devices, in the first direction in the secondsubstrate, wherein a fourth width of a first subset of the fourthplurality of scribe lines is lesser relative to a fifth width of asecond subset of the fourth plurality of scribe lines, and wherein thesecond subset of the fourth plurality of scribe lines are closer to acenter of the second substrate relative to the first subset of thesecond plurality of scribe lines.
 7. The method of claim 1, wherein thethird plurality of scribe lines are in the second direction in thesecond substrate; and wherein the method further comprises: forming afourth plurality of scribe lines, between the second plurality ofsemiconductor devices, in the first direction in the second substrate,wherein a fourth width of a first subset of the fourth plurality ofscribe lines is lesser relative to a fifth width of a second subset ofthe fourth plurality of scribe lines.
 8. The method of claim 7, whereinthe second subset of the fourth plurality of scribe lines are closer toa center of the second substrate relative to the first subset of thefourth plurality of scribe lines.
 9. A method, comprising: forming afirst plurality of semiconductor devices of a first substrate; forming afirst plurality of scribe lines, between the first plurality ofsemiconductor devices, along a first axis of the first substrate;forming a second plurality of scribe lines, between the first pluralityof semiconductor devices, along a second axis of the first substrate,wherein a first width of a first subset of the second plurality ofscribe lines is lesser relative to a second width of a second subset ofthe second plurality of scribe lines; and performing a bonding operationto bond the first plurality of semiconductor devices and a secondplurality of semiconductor devices of a second substrate, wherein thefirst width being lesser relative to the second width, and the firstwidth and the second width being lesser relative to a third width of athird plurality of scribe lines between the second plurality ofsemiconductor devices, result in approximate alignment of the firstplurality of semiconductor devices and the second plurality ofsemiconductor devices during the bonding operation.
 10. The method ofclaim 9, wherein forming the first plurality of scribe lines comprises:forming a first subset of the first plurality of scribe lines to afourth width; and forming a second subset of the first plurality ofscribe lines to a fifth width, wherein the fifth width is lesserrelative to the fourth width.
 11. The method of claim 10, whereinforming the first plurality of scribe lines comprises: forming the firstsubset of the first plurality of scribe lines closer to a center of thefirst substrate relative to the second subset of the first plurality ofscribe lines.
 12. The method of claim 10, wherein the first width beinglesser relative to the second width, and the first width and the secondwidth being lesser relative to the third width, result in approximatealignment of the first plurality of semiconductor devices and the secondplurality of semiconductor devices along the second axis; and whereinthe fifth width being lesser relative to the fourth width results inapproximate alignment of the first plurality of semiconductor devicesand the second plurality of semiconductor devices along the first axis.13. The method of claim 9, wherein the third plurality of scribe linesare along the second axis in the second substrate; wherein a fourthwidth of a first subset of the third plurality of scribe lines isgreater relative to a fifth width of a second subset of the thirdplurality of scribe lines; and wherein the method further comprises:forming a fourth plurality of scribe lines, between the second pluralityof semiconductor devices, along the first axis in the second substrate,wherein a sixth width of a first subset of the fourth plurality ofscribe lines is greater relative to a seventh width of a second subsetof the fourth plurality of scribe lines.
 14. The method of claim 13,wherein seventh widths of the third plurality of scribe lines increasesfrom a center of the second substrate to an edge of the secondsubstrate.
 15. A method, comprising: receiving, by a processing device,information associated with a plurality of operations to bond a firstplurality of semiconductor devices on a first plurality of substrateswith a second plurality of semiconductor devices on a second pluralityof substrates; generating, by a processing device, thermal expansiondata for the first plurality of substrates and thermal expansion datafor the second plurality of substrates based on the informationassociated with the plurality of bonding operations; determining, by theprocessing device and based on the thermal expansion data for the firstplurality of substrates and the thermal expansion data for the secondplurality of substrates, adjusted widths for a plurality of scribe linesof at least one of a third substrate or a fourth substrate; andproviding, by the processing device, an indication of the adjustedwidths to one or more semiconductor processing tools for forming theplurality of scribe lines based on the adjusted widths.
 16. The methodof claim 15, further comprising: bonding a third plurality ofsemiconductor devices on the third substrate with a fourth plurality ofsemiconductor devices on the fourth substrate after forming theplurality of scribe lines, wherein the plurality of scribe lines arebetween at least one of the third plurality of semiconductor devices orthe fourth plurality of semiconductor devices.
 17. The method of claim15, wherein the thermal expansion data for the first plurality ofsubstrates comprises respective semiconductor expansion measurements foreach of the first plurality of substrates; and wherein the thermalexpansion data for the second plurality of substrates comprisesrespective semiconductor expansion measurements for each of the secondplurality of substrates.
 18. The method of claim 17, wherein determiningthe adjusted widths for plurality of scribe lines comprises: determiningan adjustment parameter based on the respective semiconductor expansionmeasurements for each of the first plurality of substrates and therespective semiconductor expansion measurements for each of the secondplurality of substrates; and determining the adjusted widths for theplurality of scribe lines based on the adjustment parameter.
 19. Themethod of claim 15, further comprising: forming a first subset of theplurality of scribe lines in the third substrate along a first axis; andforming a second subset of the plurality of scribe lines in the thirdsubstrate along a second axis approximately perpendicular to the firstaxis.
 20. The method of claim 15, further comprising: forming a firstsubset of the plurality of scribe lines in the third substrate; andforming a second subset of the plurality of scribe lines in the fourthsubstrate.